TiSi(Ge) Contacts Formed at Low Temperature Achieving Around $2 \,\, \times \,\, 10^{-{9}}~\Omega $ Cm2 Contact Resistivities to P-Sige

Hao Yu,Marc Schaekers,Jian Zhang,Lin -Lin Wang,Jean-Luc Everaert,Naoto Horiguchi,Yu-Long Jiang,Dan Mocuta,Nadine Collaert,Kristin De Meyer
DOI: https://doi.org/10.1109/ted.2016.2642888
IF: 3.1
2017-01-01
IEEE Transactions on Electron Devices
Abstract:This paper reports ultralow contact resistivities (.c) achieved on highly doped p-SiGe with two low-temperature contact formation methods. One method combines precontact amorphization implantation with similar to 500 degrees C rapid thermal processing (RTP)-based Ti germano-silicidation;.c achieved was similar to 2.9 x 10-9 Omega.cm(2). The other method combines codeposited TiSi-Ti: Si = 1: 1-with similar to 450 degrees C RTP-based Ti silicidation;.c achieved was similar to 1.7 x 10-9 Omega.cm(2). When.c reaches minimum, the TiSi(Ge) alloy is generally amorphous with embedded small crystallites, similar to the previous observations on pure Si substrates.
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