Improvement of Phase Change Properties of Stacked Ge2sb2te5/Znsb Thin Films for Phase Change Memory Application

Zifang He,Weihua Wu,Xinyi Liu,Jiwei Zhai,Tianshu Lai,Sannian Song,Zhitang Song
DOI: https://doi.org/10.1016/j.matlet.2016.09.021
IF: 3
2016-01-01
Materials Letters
Abstract:Ge2Sb2Te5/ZnSb (GST/ZS) stacked thin films were proposed for high density phase change memories (PCM). Electrical and structural properties were studied by in-situ resistance measurements and X-ray diffraction (XRD), respectively. The films exhibited good thermal stability and two resistance steps during heating process. A picosecond laser pump-probe system was used to measure phase change speed. Phase change memory cells based on [GST(35 nm)/ZS(15 nm)](1) thin film were fabricated to test and verify multi-level switch between set and reset states.
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