New progress in optically excited and interrogated micromachined silicon resonant sensor

Haoyang WU,Bingqian LI,Changchun ZHU,Junhua LIU

DOI: https://doi.org/10.3969/j.issn.1001-5868.1999.01.002

1999-01-01

Abstract:Optically excited and picked micromachined silicon resonant sensors are introduced based on the basic principle.Recent progress in pressure and temperature sensors and the future trend in this field are also discussed.

What problem does this paper attempt to address?

Discussion on the optical-coupling in silicon optical-type micromechanical sensors

Ding Chun,Yaqiang Wang,Yuelin Wang-,Zhonghe Jin

DOI: https://doi.org/10.1109/ICSICT.1998.786542

1998-01-01

Abstract:A flow-sensor and a resonator are fabricated on silicon substrate using the micromechanical technology. The devices are with a structure based on a silicon cantilever with waveguide on the surface to detect the movement of the silicon cantilever. The method to couple the laser into the waveguide is discussed and the performance of the fabricated devices are characterized.
Relationship between silicon micromechanical resonators and excited point

Hao Yu.,Chun Ding,Yuelin Wang-,Yaqiang Wang,Zhonghe Jin,Yigang Xu

1998-01-01

Abstract:The optically excited vibrations of silicon cantilever resonators are studied. The theoretical results and experimental results of cantilever's coherent frequency are given and the effect of excited point on the vibration of the cantilever is discussed. The amplitude of output signal is related with the position of optical excited point and the vibration mode. We can get the highest amplitude by selecting the center point of two nodal of the vibration mode, then the amplitude decreases with the optical beam move to the nodal of the mode, where we get the lower signal. This result is satisfactory to other micromechanical resonators with point heating excitation.
The Optical Excitation of Silicon Microresonator

喻浩,丁纯,金仲和,徐义刚,王跃林

DOI: https://doi.org/10.3321/j.issn:0372-2112.1998.06.006

1998-01-01

Tien Tzu Hsueh Pao/Acta Electronica Sinica

Abstract:The optical experimental excitation of a silicon cantilever resonator is studied theoretically and experimentally. The amplitude-frequency response and the relationship between the output of resonators and the position of excitation are discussed. These results provide the theoretical basis for the optical-micro-mechanical resonators.
Design on electrostatically excited silicon micromachined resonant pressure sensor

Sen REN,Wei-zheng YUAN,Jin-jun DENG,Xiao-dong SUN

DOI: https://doi.org/10.3969/j.issn.1000-9787.2014.01.017

2014-01-01

Abstract:A silicon micromachined resonant pressure sensor with electrostatic excitation and capacitive detection is designed,which uses improved lateral dynamically balanced double-ended tuning fork resonator. The fabrication process is based on silicon-on-insulator(SOI) wafer. Connecting truss has been developed to restrain perpendicular position shift of the resonator when the diaphragm deflects. Considering weak signal and same frequency interference in detection,several methods such as guard electrodes, reduced AC drive voltage amplitude,differential capacitive detection and scheme of high-frequency carrier modulation and demodulation is taken.Furthermore,open-loop measurement system is designed based on interface circuit,and preliminary character measurements is carried out under atmospheric pressure packaging condition. Testing results show that the fundamental resonant frequency is 33. 886 kHz,and vibration quality factor is 1222. Over the gauge pressure range of 0 ~ 280 kPa,the nonlinearity is 0. 018 % FS,the hysteresis error is 0. 176 % FS,the repeatability is 0. 213 % FS,and the average temperature drift of the resonator is- 0. 037 % / ℃ at the range of- 20~ 60 ℃.
Modelling and Characterisation of a Micromachined Resonant Pressure Sensor with Piezoelectric Excitation and Sensing

Rongjun Cheng,Yulong Zhao,Cun Li,Bo Li,Qi Zhang

DOI: https://doi.org/10.1049/mnl.2016.0016

2016-01-01

Abstract:A resonant pressure sensor with piezoelectric excitation and sensing is presented, which is realised by combining a micromachined diaphragm and a quartz resonator. The sensor performance is improved by introducing double enhancement beams into the diaphragm. Finite element method is utilised to reveal the validity and optimise the structural dimensions. A self-excitation circuit is designed to drive the resonator into steady oscillation. The sensor chip is fabricated by bulk micromachining technologies and packaged in a metal shell in the inert gas environment for characterisation. The performance characteristics including the short-term drift, temperature characteristic and quality factor are investigated. The experimental results demonstrate that the sensor features a high sensitivity of 100.45 Hz/kPa and a short-term drift <14 ppm in the operating range of −10∼10 kPa at room temperature. Owing to the excellent performance in sensitivity and accuracy, the sensor can be applied for micropressure measurement.
A Silicon Micromachined Resonant Pressure Sensor

Zhangyang Tang,Shangchun Fan,Chenguang Cai

DOI: https://doi.org/10.1088/1742-6596/188/1/012042

2009-01-01

Journal of Physics Conference Series

Abstract:This paper describes the design, fabrication and test of a silicon micromachined resonant pressure sensor. A square membrane and a doubly clamped resonant beam constitute a compound structure. The former senses the pressure directly, while the latter changes its resonant frequency according to deformation of the membrane. The final output relation between the resonant frequency and the applied pressure is deducted according to the structure mechanical properties. Sensors are fabricated by micromachining technology, and then sealed in vaccum. These sensors are tested by open-loop and close-loop system designed on purpose. The experiment results demonstrate that the sensor has a sensitivity of 49.8Hz/kPa and repeatability of 0.08%.
Highly-Sensitive Optical Biosensors Based on Silicon-On-Insulator Nanowire Waveguide

Jian-Jun He

DOI: https://doi.org/10.1109/piers.2016.7734728

2016-01-01

Abstract:Summary form only given. Optical waveguide sensors based on silicon-on-insulator (SOI) nanowire have received great interest due to their potential applications in many fields including bacteria and virus detection, medical diagnostics, food quality control, environment monitoring, and drug development. Various types of SOI sensors have been developed, including Mach-Zehnder interferometer, microdisks and microring resonators. High-sensitivity sensors based on cascaded double-ring resonators and a Mach-Zehnder interferometer (MZI) cascaded with a microring resonator employing Vernier effect have recently been proposed and experimentally demonstrated. Simple and low-cost intensity interrogation can be employed without using a high resolution spectrometer or a narrow line-width tunable laser. Label-free detection capability of these two types of SOI sensors have also been demonstrated. This talk reviews our work on the design, fabrication and measurement of SOI nanowire based high-sensitivity biosensors employing Vernier effect. Biosensing experiments using cascaded double-ring sensor and Mach-Zehnder-ring sensor integrated with microfluidic channels are also presented.
Closed loop control of silicon micromachined resonant pressure sensors

Sun Jinhao,Fan Shangchun,Xing Weiwei

DOI: https://doi.org/10.3969/j.issn.1002-7300.2012.10.001

2012-01-01

Abstract:Improving the silicon micromachined resonant pressure sensor's performance index have a lot of methods,how to track all the resonance frequency point in real time closed loop about known sensitive structure of the output range is one of them.First,several commonly used excited-detected ways of silicon micromachined resonant pressure sensor is introduced,and carry the comparative analysis on domestic and foreign literature given closed-loop control method to resonant sensor,then give an improved way to closed loop controlling of a electrothermally excited-detected by a piezoresistor resonant pressure sensor,and gives out to improve the performance of the sensor all kinds of effective means and research direction.
Research of a Novel Micromachined Resonant Pressure Sensor

史晓晶,陈德勇,王军波,毋正伟,刘磊

DOI: https://doi.org/10.3969/j.issn.1004-1699.2009.06.006

2009-01-01

Abstract:A novel resonant pressure sensor structure is proposed.Electromagnetic excitation and differential detection are adopted.30μm diffused(100) silicon is used for the resonator,thus the resonator and the pressure diaphragm can be fabricated on the same silicon substrate without bonding,which can avoid the stress from the bonding process.The theoretical analysis,FEA-ansys simulation,fabrication process,and the testing experiments are described.In the full scale 0～100 kPa,the experiments results show that the quality factor(Q) is better than 10 000 in low vacuum,the resolution is 1/10 000,the nonlinearity is 0.62%,and the differential sensitivity is 200 Hz /kPa.
The Research on Optically Excited Silicon Resonators

高金山,王家桢,童诗白

DOI: https://doi.org/10.3321/j.issn:0372-2112.1998.05.014

1998-01-01

Tien Tzu Hsueh Pao/Acta Electronica Sinica

Abstract:This paper describes a silicon micro-resonator with which a new class of fiber-optic sensors can be formed. The basic principle is that the measured value changes the resonance frequency of the micro-resonator. The flexural vibrations of the micro-resonator are excited photo-thermally under the action of modulated optical radiation. The fabrication of micro-bridge-type resonators made of single-crystal silicon is presented. The mechanism of which micro-resonators are optically activated is identified and discussed.
A New Frequency Characteristics Test System for Silicon Micromachined Resonant Sensor

TANG Zhang-yang,FAN Shang-chun,CAI Chen-guang

DOI: https://doi.org/10.3969/j.issn.1002-1841.2009.z1.078

2009-01-01

Abstract:A new frequency characteristics test system for silicon micro-machined resonant pressure sensor was presented in this paper.Direct correlation principle was applied for weak signal detection,simplifying the analog circuits.A kind of time-sharing, quadrature-phase strategy was proposed to obtain amplitude-frequency and phase-frequency characteristics respectively.The series experimental results demonstrated that,this system fulfilled the test for complete frequency characteristics of silicon micromachined resonant sensors.Experimental results are consistent with the theoretical ones,providing essential parameters for closed-loop design and important information for fabrication technology improvement.
Research of optically excited and interrogated silicon resonators

Jinshan Gao,Jiazhen Wang,Shibai Tong

1998-01-01

Abstract:The problems in measuring the vibration of microbeams are analyzed. A modulated light from a laser diode has been used to excite the microbeam into vibration. The vibration of the microbeam is measured with a laser interferometric method. The test results suggest that this method can be used for precision measurement of microbeams.
A Micromachined Resonant Micro-Pressure Sensor

Sen Zhang,Yu Zheng,Yulan Lu,Bo Xie,Deyong Chen,Junbo Wang,Jian Chen

DOI: https://doi.org/10.1109/jsen.2021.3091843

IF: 4.3

2021-09-15

IEEE Sensors Journal

Abstract:This article presents a micromachined resonant micro-pressure sensor, which consists of a SOI wafer for pressure sensing and a glass cap for vacuum packaging. More specifically, two resonators fabricated in device layer of SOI wafer were positioned around the center and border of pressure-sensitive diaphragm respectively with the purposed of transforming pressure. Simulations based on finite element analysis were applied to the design and optimization of the micro-pressure sensor where technical issues correlated with mechanical coupling and overloading were addressed properly. The micro-pressure sensors were fabricated by silicon based bulk-micromachining processes, and characterized by both open-loop and closed-loop testing. The characterization results revealed quality factors higher than 25000 in full pressure (0.05 kPa to 10 kPa) and temperature (−40°C to 85°C) scales, and at least 12 times of anti-overload capabilities for developed sensors. The differential pressure sensitivities were quantified as 615.47±9.82 Hz/kPa (−40°C), 589.56±4.34 Hz/kPa (15°C) and 561.70 ±8.75 Hz/kPa (85°C) respectively, as well the repeatability, hysteresis, and nonlinearity were calculated as 0.0485±0.0032%, 0.0299±0.0018%, and 0.0493±0.0025% respectively for the developed sensors. Meanwhile, the maximum fitting deviations were quantified within ±5.24 Pa in full pressure (0.05 kPa to 10 kPa) and temperature (−40°C to 85°C) scales, demonstrating accuracies of 0.0524% full scale, further indicating that the developed sensor is a potential candidate in the field of micro-pressure measurements.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
High-sensitivity silicon photonic biosensors based on cascaded resonators

Xianxin Jiang,Jinyan Song,Lei Jin,Jianjun He

DOI: https://doi.org/10.1117/12.2001581

2012-01-01

Abstract:Silicon photonic biosensors based on cascaded resonators employing the Vernier effect are shown to be capable of greatly increasing the sensitivity. Two implementation schemes are presented, one using two cascaded ring resonators with a broadband light source, and the other by cascading a Fabry-Perot laser with a silicon ring resonator. Simple intensity interrogation schemes are developed to advance the planar waveguide sensor technology towards low-cost practical applications.
New silicon micromechanical resonant viscosity vacuum gage

Yaqiang Wang,Zhonghe Jin,Yuelin Wang-,Chun Ding

1997-01-01

Abstract:A new type of resonant viscosity vacuum gage based on the silicon micromechanical resonant vacuum sensor by electrostatic excitation was developed. It can measure the pressures over a range from 1 Pa to 1.33��103 Pa. The theoretical analysis and experimental results were presented.
A Novel Resonant Pressure Sensor with Boron Diffused Silicon Resonator

Junbo Wang,Xiaojing Shi,Lei Liu,Zhengwei Wu,Deyong Chen,Jinmin Zhao,Shourong Li

DOI: https://doi.org/10.1117/12.811759

2009-01-01

Abstract:To improve the performance of the micro-machined resonant pressure sensor and simplify its fabrication process, a novel structure is proposed in which the boron diffused silicon (up to 15um thickness) and the bulk silicon are used as the resonant beam and pressure membrane respectively. The structural parameters were optimized through FEM to achieve the better sensitivity, and the relationships between the structural parameters and the sensitivity were established. Moreover, the fabrication processes were discussed to increase the product rate and the pressure sensor with the optimal structural parameters was fabricated by the bulk silicon MEMS processes. In order to enhance the signal of the sensor and make the closed-looped control of the sensor easily, electromagnetic excitation and detection was applied. However there is so high noise coming from the distributing capacitances between the diffused silicon layer and electrodes that reduce the signal to noise ratio of the sensor. Through the analysis of the micro-structure of the sensor, the asymmetrical excitation circuit was used to reduce the noise and then the detection circuit was designed for this sensor. The resonator of the sensor was packaged in the low vacuum condition so that the high quality factor (Q) with about 10000 can be achieved. Experimental tests were carried out for the sensor over the range of -80kPa to 100kPa, the results show that the sensitivity of the sensor is about 20kHz/100kPa, the sensitivity is 0.01%F.S. and the nonlinearity is about 1.8%.
Silicon Microring Sensors *

Zhiping Zhou,Huaxiang Yi

DOI: https://doi.org/10.1117/12.908551

2017-01-01

Abstract:Due to its closed-loop structure, the silicon microring resonator can have a very high quality factor value and its output intensity is very sensitive to different wavelengths. These characters, plus the potential in CMOS compatible fabrication process, are making the silicon microring resonator a key building block of photonic integrated circuits for the applications of filtering, switching, modulation, and wavelength conversion. In parallel, the silicon microring resonator has also been proposed as a compact and highly sensitive optical sensor. In recent years, microring sensing related research and development has been growing consistently and rapidly for the purposes of environment monitoring, health diagnosis, and drug development. This article will firstly review the recent development in silicon microring sensors, which are mainly concentrated in two areas: to improve the sensitivity and to enhance selectivity. In order to have better understanding of this class of sensors, the basic structure of the microring sensors, its working principle, and its unique properties will be described. Then, our own works, in particular, the methods to improve dynamic range, sensitivity, and stability of the silicon microring sensors, will be presented. By studying the fundamental optical properties of the coupled microring resonators, novel silicon microring sensors with better and more reliable sensing performance are constructed. Finally, through studying the interactions between chemistry and optics, acceleration and optics, the specific applications in glucose sensing and seismic sensing are discussed.
On-Chip Integrated Interrogator Based on Silicon Microring Resonator

Chen Qiu,Jianyi Yang,Xiaoqing Jiang

DOI: https://doi.org/10.1109/pgc.2012.6458084

2012-01-01

Abstract:An on-chip interrogator for wavelength-modulated optical sensors is developed based on a thermal tunable silicon microring resonator. The center wavelength of the sensors can be readout from the tuning power corresponding to the peak optical output intensity of the system by scanning the resonant wavelength of the microring filter. Both on-chip (microring) and off-chip (FBG) wavelength-modulated sensor are interrogated by our microring interrogator.
Electrostatic-excited Silicon unitized micromechanical resonator

Zhonghe Jin,Yaolin Wan,Yigang Xu,Chun Ding,FengQiu Chen

1995-01-01

Tien Tzu Hsueh Pao/Acta Electronica Sinica

Abstract:A new structure of silicon-unitized resonator was proposed and realized, which is made by SDB technique. Electrostatic force was analyzed. The experiments show that the resonance frequency of the device is about 5.86kHz and the Q-factor is above 600 in 10Pa vacuum.
Research progress of silicon resonant MEMS accelerometer

LI Jing,FAN Shang-chun,LI Cheng,YU Zhao-fa

DOI: https://doi.org/10.3969/j.issn.1000-9787.2011.12.002

2011-01-01

Abstract:The silicon resonant micro-electro-mechanical system(MEMS) accelerometer is a new kind of sensor which is used to measure the acceleration by detecting the change of resonant frequency of the sensitive element.This kind of sensor has many advantages such as frequency signal output,high stability and sensitivity.The fabrication process is also introduced in detail.General research prospect is summarized.

New progress in optically excited and interrogated micromachined silicon resonant sensor

Discussion on the optical-coupling in silicon optical-type micromechanical sensors

Relationship between silicon micromechanical resonators and excited point

The Optical Excitation of Silicon Microresonator

Design on electrostatically excited silicon micromachined resonant pressure sensor

Modelling and Characterisation of a Micromachined Resonant Pressure Sensor with Piezoelectric Excitation and Sensing

A Silicon Micromachined Resonant Pressure Sensor

Highly-Sensitive Optical Biosensors Based on Silicon-On-Insulator Nanowire Waveguide

Closed loop control of silicon micromachined resonant pressure sensors

Research of a Novel Micromachined Resonant Pressure Sensor

The Research on Optically Excited Silicon Resonators

A New Frequency Characteristics Test System for Silicon Micromachined Resonant Sensor

Research of optically excited and interrogated silicon resonators

A Micromachined Resonant Micro-Pressure Sensor

High-sensitivity silicon photonic biosensors based on cascaded resonators

New silicon micromechanical resonant viscosity vacuum gage

A Novel Resonant Pressure Sensor with Boron Diffused Silicon Resonator

Silicon Microring Sensors *

On-Chip Integrated Interrogator Based on Silicon Microring Resonator

Electrostatic-excited Silicon unitized micromechanical resonator

Research progress of silicon resonant MEMS accelerometer