The Research on Optically Excited Silicon Resonators

高金山,王家桢,童诗白
DOI: https://doi.org/10.3321/j.issn:0372-2112.1998.05.014
1998-01-01
Tien Tzu Hsueh Pao/Acta Electronica Sinica
Abstract:This paper describes a silicon micro-resonator with which a new class of fiber-optic sensors can be formed. The basic principle is that the measured value changes the resonance frequency of the micro-resonator. The flexural vibrations of the micro-resonator are excited photo-thermally under the action of modulated optical radiation. The fabrication of micro-bridge-type resonators made of single-crystal silicon is presented. The mechanism of which micro-resonators are optically activated is identified and discussed.
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