Research of optically excited and interrogated silicon resonators

Jinshan Gao,Jiazhen Wang,Shibai Tong
1998-01-01
Abstract:The problems in measuring the vibration of microbeams are analyzed. A modulated light from a laser diode has been used to excite the microbeam into vibration. The vibration of the microbeam is measured with a laser interferometric method. The test results suggest that this method can be used for precision measurement of microbeams.
What problem does this paper attempt to address?