Abstract:This study proposed an all-quartz integrated resonant accelerometer, composed of a quartz pendulum as mass-spring system and quartz double-ended tuning forks (DETFs) as resonators. The detection principle is based on force-frequency characteristic, which the vibration frequency of DETF would change once the z-axis acceleration provokes axial stress variation of vibrating beam. In order to achieve high sensitivity, critical dimensions were analyzed, selected, and simulated. Homogeneous material, integration arrangement, and isolation structure were utilized to eliminate internal mismatch, ensure high-quality resonator, and suppress external disturbance to stabilize the output of sensor. Then, the components of the sensitive structure, the pendulum and DETF, were fabricated through compatible MEMS technology separately, and the prototype was finished by microassembly and package. Experimental platform was built up and the fundamental performances were obtained, such as full-scale range (FSR) of 70 g, bandwidth of more than 150 Hz, scale factor (SF), rotary output, and nonlinearity, which implies high sensitivity as 75.346 Hz/g. Besides, short-time stability of zero bias and SF and full-temperature stability were measured. The 0 g stability for 3 h, bias instability of , and resolution were measured, calculated, and analyzed as well. All performances verified the high stability of proposed accelerometer, which is comparable or better compared with state-of-the-art counterparts. The experiment results complied with theoretical analysis and suggested its feasibility in the realm of high-precise field.

Research progress of silicon resonant MEMS accelerometer

A Review on MEMS Silicon Resonant Accelerometers

A MOEMS Accelerometer Based on Diffraction Grating with Improved Mechanical Structure.

A Compact Micromachined Interferometric Accelerometer Based on the Diffraction Grating

Optical Design and Analysis of a High Resolution MOEMS Accelerometer Based on Diffraction Grating

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

Analysis and Amelioration about the Cross-Sensitivity of A High Resolution Moems Accelerometer Based on Diffraction Grating

A New Type of MEMS Accelerometer with Up-Tuning Structure

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

A micromachined silicon resonant accelerometer

Summary of Research Status and Application of MEMS Accelerometers

Design and experiment of push-pull MEMS Resonant Accelerometers

Bulk-Silicon Resonant Accelerometer

A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators

Micro-machined Resonant Out-of-plane Accelerometer with a Differential Structure Fabricated by Silicon-on-insulator–mems Technology

Research of new seismic geophone based on MEMS

An Optical Interferometry Based MEMS Accelerometer Applicable to Seismic-Grade Measurement

Bulk-Micromachined Silicon Resonant Accelerometer

An All-Quartz Integrated Resonant Accelerometer With High Sensitivity and Stability: Design, Fabrication, and Measurement

Progress of MEMS acoustic emission sensor: a review

Design and Test of a Micromachined Resonant Accelerometer with High Scale Factor and Low Noise