Abstract:Optical coupling between subwavelength grating pairs allows for the precise measurement of lateral or vertical displacement of grating elements and gives rise to different types of displacement and inertial sensors. In this paper, we demonstrate a design for a nano-optomechanical accelerometer based on a subwavelength grating pair that can be easily fabricated by a single Silicon-on-insulator (SOI) chip. The parameters of the subwavelength grating pair-based optical readout, including period, duty cycle, thickness of grating and metal film, and the distance of the air gap, were optimized by combining a genetic algorithm and rigorous coupled wavelength analysis (RCWA) to obtain the optimal sensitivity to the displacement of suspended grating element and the acceleration. A corresponding mechanical design was also completed to meet the highly sensitive acceleration measurement requirement while considering the mechanical cross-axis sensitivity, dynamic range, bandwidth, and fabrication feasibility. This device was verified by both RCWA and finite-different-time-domain methods, and a tolerance analysis was also completed to confirm that it is able to achieve the extremely high optical displacement sensitivity of 1.8%/nm, acceleration-displacement sensitivity of 1.56 nm/mg, and acceleration measurement sensitivity of more than 2.5%/mg, which is almost one order of magnitude higher than any reported counterparts. This work enables a single SOI-based high performance accelerometer, and provides a theoretical basis and fabrication guides for the design.

Bulk-Micromachined Silicon Resonant Accelerometer

Bulk-Silicon Resonant Accelerometer

Design and Test of a Micromachined Resonant Accelerometer with High Scale Factor and Low Noise

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

A micromachined resonant accelerometer

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

A New Type of MEMS Accelerometer with Up-Tuning Structure

Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs

Design Of A High-Sensitivity Micromechanical Resonant Accelerometer With A Two-Stage Microlever

A micromachined silicon resonant accelerometer

Critical Technologies in Design of Micromechanical Resonant Accelerometer

A Silicon Resonant Accelerometer with Vibrating Beam Integrated with Comb Fingers Sensing Structure.

A New Analytical Model of Single-Stage Microleverage Mechanism in Resonant Accelerometer

A Highly Sensitive Biaxial Resonant Accelerometer with Two-Stage Microleverage Mechanisms

Structural Design and Testing of a Micromechanical Resonant Accelerometer

Design and Simulation of A Multi-Finger Micromechanical Silicon Accelerometer

A Micromechanical Structure Eliminating Lateral Effect of Silicon Accelerometer

Design, Analysis, and System-Level Simulation of A Micromachined Resonant Charge Sensor with Microleverage Mechanisms

A Mems Piezoelectric In-Plane Resonant Accelerometer With Two-Stage Micro-Leverage Mechanism

A Compact Micromachined Interferometric Accelerometer Based on the Diffraction Grating

Double Tuning-Fork Resonant Accelerometer