Study on the Chemo-mechanical Polishing Quality of LiNb03 Cubic Flake

邢彤,袁巨龙,赵文宏,曹志锡
DOI: https://doi.org/10.3969/j.issn.1002-2333.2003.07.007
2003-01-01
Abstract:In this paper,the Chemical Mechanical Polishing method has been applied to th e experiment research,the test were carried on a new brainpower type super pre cision polishing machine,and the LiNbO 3 wafers were polished in a home-made slurry.Studies have shown that this is an attractive method if parameters were properly selected;We can gain a nearl y none-damaged layer,super smooth surface.In the test,the scanning probe mic roscope(SPM)were used to gain photos of the microcosmic surface of LiNbO 3 wafer,We also an a-lyzed the polishing mechanism on LiNbO 3 wafer,and the cau sa tion of it’s surface machining flaws and the damaged layer.
What problem does this paper attempt to address?