Preparation of Nanometer SiO2 Slurry and its Polishing Performance on Disk CMP

雷红,雒建斌,潘国顺
DOI: https://doi.org/10.3969/j.issn.0254-0150.2004.03.029
2004-01-01
Abstract:With magnetic heads operating closer to the disks, the hard disks are forced to be ultra-smooth. Chemical-mechanical polishing of hard disk substrate with nickel-phosphorous plated in the prepared nanometer SiO2 slurry was studied. Chapman MP2000+ Surface Profiler showed that the average roughness (Ra) and waviness (Wa) of the surface were reduced to 0.052 nm and 0.063 nm respectively, those are the lowest value reported to date for hard disk polishing. Atom Force Microscopy (AFM) showed that, a very smooth finishing surface without micro-scratches, pits as well as other micro defects, was obtained.
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