Influences of Slurry Ingredients on Super-Smooth Surface Polishing of Hard Disk Substrate

ZHOU Yan,LUO Gui-hai,PAN Guo-shun
DOI: https://doi.org/10.3969/j.issn.1672-6030.2012.02.015
2012-01-01
Abstract:A slurry containing silica sol particles,oxidant,complexing agent and lubricant agent was developed in final polishing of hard disk Ni-P substrate to realize high material removal rate(MRR) and atomic level roughness smooth surface for more rigorous demands of hard disk.The effects of slurry ingredient on polishing performance were researched.The results show that silica sol with the average particle size of 25 nm can reduce the generation of micro-scratches.Hydrogen peroxide as oxidant helps to improve MRR obviously.MRR increases when organic acid,especially salicylic acid is added as complexing agent.The influences of different complexing agents on MRR were investigated,and their influence mechanisms were discussed.When glycerin is introduced into the slurry as lubricant agent,friction coefficient in polishing process is reduced,and the surface roughness of hard disk substrate decreases remarkably.Atomic force microscope(AFM),optical microscope and Chapman MP2000+ surface profiler were used to examine polishing surface quality.Finally,hard disk substrate surface with the surface roughness Ra of 0.08 nm and MRR of 0.132 μm/min was obtained under the effect of different slurry ingredients.
What problem does this paper attempt to address?