A New Method for Improving Sensing Characteristics of Porous Silicon

李宏建,崔昊杨,黄伯云,易丹青,何英旋,彭景翠
DOI: https://doi.org/10.3969/j.issn.1004-5929.2004.01.019
2004-01-01
Abstract:The luminescence quenching effect of porous Si caused by adsorbing organic moleculars are investigated. It indicates that the solvent molecules of quenching luminescence are polarized molecules and the different polarity determines the different quenching, and the quenching caused by molecules absorbed of oxide porous Si has better reversibility and selectivity than that of porous Si. By using n-butylamine as carbon resource, carbon-nitrogen(c-n) film was deposited on the p-n junction(p-n) porous Si surface by means of a radio-frequency glow discharge plasma system. Electroluminescence (EL) intensity enhancement and EL peak blueshift of the passivated porous Si are observed experimentally. Further, the intensity decay and the peak blueshift of porous Si are not observed after storing 60 days in the atmosphere. The current-voltage characteristics show that the series resistance Rs and driven voltage in the ITO/c-n/p-n porous Si diode is reduced greatly compared with the ITO/p-n porous Si diode. It provides a new method for improving sensing characteristics of porous Si.
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