A Novel Technology to Fabricate the Arbitrary Nanopattern

石建平,陈旭南,陈献忠,高洪涛
DOI: https://doi.org/10.3969/j.issn.1671-4776.2004.08.001
2004-01-01
Abstract:A new technology using atomic hologram to manipulate the atoms movement is presented which can fabricate arbitrary nano-pattern resorted to an unique atom hologram. It can make up the shortage that only the periodic dots or lines can be made when using laser standing wave field to control the atoms to stack on wafer in atom lithography. The based theory of atomic hologram is introduced,and then the technological plan is shown. The simulated research was carried out,and the results show that lines of 50 nm,dots of 60 nm with MSR 1∶1 and the pattern of 1.2 μm×1.2 μm are obtained. This indicates that this technology can not only fabricate the periodic patterns such as lines,dots and corner lines etc,but also the arbitrary micro patterns with nanometer resolution.
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