Abstract:A metasurface is introduced, for the first time, into 3D nanolithography resulting in the construction of a miniaturized and simplified two‐photon polymerization system that achieved efficient multi‐focus parallel processing with high uniformity. The utilization of metasurface devices will provide a novel two‐photon polymerization operating platform, enabling richer and more flexible printing functionalities while maintaining system miniaturization and low cost. 3D nanolithography based on two‐photon polymerization (TPP) allows for the high‐precision fabrication of nearly arbitrary 3D micro/nanostructures, finding extensive applications in areas such as micro‐optics, micro‐mechanics, and biomedicine. However, the large size, complexity of optical systems, and high costs have significantly constrained the widespread adoption of 3D nanolithography technology in both scientific research and industry. In this study, a metasurface is introduced, for the first time, into 3D nanolithography resulting in the construction of a miniaturized and simplified TPP system that achieved efficient multi‐focus parallel processing with high uniformity. A microlens array is fabricated, showcasing the system's application capacity to generate an array of devices with high consistency and quality. It is believed that the utilization of metasurface devices will provide a novel TPP operating platform, enabling richer and more flexible printing functionalities while maintaining system miniaturization and low cost.

Ultrafast 3D nanofabrication via digital holography

High-resolution 3D Nanoprinting Based on Two-Step Absorption Via an Integrated Fiber-Coupled Laser Diode.

Subdiffraction 3D Nanolithography by Two‐Photon Two‐Step Absorption and Photoinhibition

Single-color Peripheral Photoinhibition Lithography of Nanophotonic Structures

High Throughput Laser Nano Direct Writing Technique

High-speed two-photon lithography based on femtosecond laser

Ultrafast multi-focus 3-D nano-fabrication based on two-photon polymerization

Beyond 100 nm Resolution in 3D Laser Lithography: Post Processing Solutions

Three-dimensional nanofabrication via ultrafast laser patterning and kinetically regulated material assembly

3D Nanolithography via Holographic Multi‐Focus Metalens

Three Dimensional Micro-Mechanical And Micro-Optical Devices Fabricated By Holographic Two-Photon Lithography

Direct Laser Writing Breaking Diffraction Barrier Based on Two-Focus Parallel Peripheral-Photoinhibition Lithography

Two-photon lithography for three-dimensional fabrication in micro/nanoscale regime: A comprehensive review

High-Throughput Two-Photon 3D Printing Enabled by Holographic Multi-Foci High-Speed Scanning

Fabrication Of Three Dimensional Micro Devices By Means Of Two Photon Photopolymerization

Multi-focal multi-photon microscopy for fast parallel direct laser writing

Three-Dimensional Nanolithography with Visible Continuous Wave Laser Through Triplet Up-Conversion.

Three-dimensional microfabrication using spatiotemporal shaped femtosecond laser pulses (Conference Presentation)

High-Resolution Femtosecond Laser 3d Micromachining Using Low-Na Focusing Systems

2.5D, 3D and 4D Printing in Nanophotonics - a Progress Report

Laser nanoprinting of 3D nonlinear holograms beyond 25000 pixels-per-inch for inter-wavelength-band information processing