FABRICATION OF INTRINSIC JOSEPHSON JUNCTIONS WITH CONTROLLABLE NUMBER OF JUNCTIONS

尤立星,吴培亨,吉争鸣,范世雄,许伟伟,蔡卫星,康琳,C.T.Lin
DOI: https://doi.org/10.3969/j.issn.1000-3258.2003.03.008
2003-01-01
Abstract:With low etching rates of Argon ion milling, conventional fabrication process is improved by precisely measuring or controlling the parameters of the fabrication, which include the thickness of silver layer and the time and rates of etching process. We obtained intrinsic Josephson junctions of mesa structure, the number of junctions in which is controllable with the error within ±1. The minimum number we obtained is only 2 with the consideration of the existence of the surface junction. The critical current of each junction in the stack is quite consistent.
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