FABRICATION OF LARGE SIZE JOSEPHSON INTRINSIC JUNCTIONS BASED ON THE HIGH TEMPERATURE SUPERCONDUCTING SINGLE CRYSTAL MATERIAL

ZHANG Qiu-Yi,JIANG Zhen-guo,CHEN Jian,KANG Lin,XU Wei-wei,WU Pei-heng
2012-01-01
Abstract:Succeeded in fabricating large size Terahertz emitter device with neat feature and high consistency,basing the high temperature superconducting single crystal material.Summarized the fabrication process,and made improvements.Used the scanning electron microscope to observe the sample feature after argon ion milling,and determined the optimum post-baking temperature condition of the photolithography process.Report a good repeatability and high success rate fabrication process.
What problem does this paper attempt to address?