Abstract:Since the discovery of the unconventional copper-oxide high-transition-temperature superconductors (HTS), researchers have explored many methods to fabricate superconducting tunnel junctions from these materials for both superconducting electronics operating at the practical temperature of liquid nitrogen (77 K) and for fundamental measurements essential for testing and guiding theories of these remarkable superconductors. The difficulty is that the traditional estimate of the superconducting coherence length is very short and anisotropic in these materials, typically ~2 nm in the a-b plane and ~0.2 nm along the c-axis. The coherence volume encloses very few superconducting pairs, so even the presence of small scale inhomogeneities can locally disrupt superconductivity unlike in conventional superconductors. Therefore the electrical properties of Josephson junctions are sensitive to chemical variations and structural defects on atomic length scales, thus to make multiple uniform HTS junctions, control at the atomic level is required. In this letter, we demonstrate very high-quality all-HTS Josephson superconducting tunnel junctions (both Josephson and quasiparticle tunneling) created by using a 500 pm diameter focused beam of helium ions to direct-write tunnel barriers into YBa2Cu3O7(YBCO) thin films. With this method we demonstrate the ability to control the barrier properties continuously from conducting to insulating by varying the irradiation dose. This technique provides a reliable and reproducible pathway for the scaling up of quantum mechanical circuits operating at practical temperatures (~77 K) as well as an avenue to conduct superconducting tunneling studies in HTS for basic science.

SUPERCONDUCTING JOSEPHSON TUNNEL JUNCTION FABRICATION PROCESS AND PERFORMANCE IMPROVEMENT

Character and Fabrication of Al/Al2O3/Al Tunnel Junctions for Qubit Application.

Fabrication of Superconducting Flux Quantum Bits and the Feature Parameters of Al/AlOx/Al Tunnel Junctions

Fabrication of Al/AlOx/Al Josephson Junctions and Superconducting Quantum Circuits by Shadow Evaporation and a Dynamic Oxidation Process

Overlap junctions for high coherence superconducting qubits

Self-aligning fabrication and DC characterization of Nb/AlOx/Nb superconducting Josephson junctions

Fabrication of Al/AlOx/Al Josephson Junctions on Silicon and Sapphire Substrates Using a Cold-Development Technique

Computational Simulations of Fabrication of Aluminum-Based Josephson Junctions: Topological Aspects of the Barrier Structure

Superconducting Coplanar Waveguide Resonators Capable of Cofabrication with Josephson Junctions

Fabrication of Al/AlO x /Al Josephson junctions on silicon and sapphire substrates using a cold-development technique

Hybrid single-electron turnstiles with thick superconducting electrodes for improved quasiparticle relaxation

Anodization-free fabrication process for high-quality cross-type Josephson tunnel junctions based on a Nb/Al-AlO$_x$/Nb trilayer

Etching suspended superconducting hybrid junctions from a multilayer

Josephson Junctions Via Anodization of Epitaxial Al on an InAs Heterostructure

Nano Josephson Superconducting Tunnel Junctions in Y-Ba-Cu-O Direct- Patterned with a Focused Helium Ion Beam

Josephson phase qubit circuit for the evaluation of advanced tunnel barrier materials

THE RESEARCH OF THE FABRICATION OF Al/Al2O3/Al TUNNEL JUNCTION

Fabrication of high quality Al/AlO_x/Al Josephson junctions

FABRICATION TECHNOLOGY AND CHARACTERISTICS OF INTRINSIC JOSEPHSON JUNCTIONS

Electron beam lithography and ion implantation techniques for fabrication of high-Tc Josephson junctions