Controlling the Intrinsic Josephson Junction Number in a 𝐁𝐢_2𝐒𝐫_2𝐂𝐚𝐂𝐮_2𝐎_8+δ Mesa

Li-Xing You,Pei-Heng Wu,Wei-Wei Xu,Zheng-Ming Ji,Lin Kang
DOI: https://doi.org/10.1143/jjap.43.4163
2004-01-01
Abstract:In fabricating Bi_2Sr_2CaCu_2O_8+δ intrinsic Josephson junctions in 4-terminal mesa structures, we modify the conventional fabrication process by markedly reducing the etching rates of argon ion milling. As a result, the junction number in a stack can be controlled quite satisfactorily as long as we carefully adjust those factors such as the etching time and the thickness of the evaporated layers. The error in the junction number is within ± 1. By additional ion etching if necessary, we can controllably decrease the junction number to a rather small value, and even a single intrinsic Josephson junction can be produced.
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