Study on the Technique of Insulating Thin Film for Manganin Gauges Packaging

崔红玲,杨邦朝,杜晓松,滕林,周鸿仁
DOI: https://doi.org/10.3969/j.issn.1001-2028.2004.12.009
2004-01-01
Abstract:Aimed at extending the measurement range of manganin gauges, the manganin sensing elements were encapsulated in alumina thin films by e-beam evaporation. The effects of the purity of alumina source and deposition times on the properties of the films were investigated. Denser and less defects films can be prepared using a 99.99% alumina source. The resistivity and dielectric loss can be reached to 1012 Ocm and 103, respectively. The adhesion and density of the films can also be improved by sequential evaporation.
What problem does this paper attempt to address?