Abstract:In this paper, an orthogonal type two-axis Lloyd's mirror interference lithography technique was employed to fabricate two-dimensional planar scale gratings for surface encoder application. The two-axis Lloyd's mirror interferometer is composed of a substrate and two reflective mirrors (X- and Y-mirrors), which are placed edge by edge perpendicularly. An expanded and collimated beam was divided into three beams by this interferometer, a direct beam and two reflected beams, projected onto the substrate, X- and Y-mirrors, respectively. The unexpected beam sections having twice reflected off the mirrors were blocked by a filter. The remaining two reflected beams interfered with the direct beam on the substrate, generating perpendicularly cross patterns thus forming two-dimensional scale gratings. However, the two reflected beams undesirably interfere with each other and generate a grating pattern along 45-degree direction against the two orthogonal direction, which influence the pattern uniformity. Though an undesired grating pattern can be eliminated by polarization modulation with introduction of waveplates, spatial configuration of waveplates inevitably downsized the eventual grating, which is a key parameter for grating interferometry application. For solving this problem, theoretical and experimental study was carefully carried out to evaluate the fabrication quality with and without polarization modulation. Two-dimensional scale gratings with a 1 m period in X- and Y-directions were achieved by using the constructed experiment system with a 442 nm He-Cd laser source. Atomic force microscopy (AFM) images and the result of diffraction performances demonstrated that the orthogonal type two-axis Lloyd's mirror interferometer can stand a small order undesired interference, that is, a degree of orthogonality between two reflected beams, denoted by , no larger than a nominal value of 0.1.

Two-Dimensional Designed Fabrication Of Subwavelength Grating Hcg Mirror On Silicon-On-Insulator

Tunable Silicon Reflection Cavity Mirror Based on Microring Resonator

Fabrication of a Two-Dimensional Diffraction Grating by a Two-Axis Lloyd's Mirror Interferometer

Analysis of a Lloyd's Mirror Interferometer for Fabrication of Gratings

Analysis and Optimization of the Arrayed-Waveguide Grating Device with Total Internal Reflection Mirrors Based on Silicon-on-insulator Material

Design and Testing of a Compact Non-Orthogonal Two-Axis Lloyd's Mirror Interferometer for Fabrication of Large-Area Two-Dimensional Scale Gratings

Mirror-Integrated Arrayed-Waveguide Grating On Silicon-On-Insulator

Robust Design by Antioptimization for Parameter Tolerant GaAs/AlOx High Contrast Grating Mirror for VCSEL Application

Fabrication Of Compact Turning Mirrors In Silicon-On-Insulator Materials

Butterfly-Inspired 2 D Periodic Tapered-Staggered Subwavelength Gratings Designed Based on Finite Difference Time Domain Method

Turning-Mirror-Integrated Arrayed-Waveguide Gratings on Silicon-on-Insulator

Compact Arrayed-Waveguide Grating on Silicon-On-Insulator with Integrated Waveguide Turning Mirrors

Holographic Fabrication of Two-Dimensional Scale Gratings for Surface Encoder by Using an Orthogonal Type Two-Axis Lloyd's Mirror Interference Lithography

Design and fabrication of 1 × 32 silica-based arrayed waveguide grating

Optimized Si/SiO2 high contrast grating mirror design for mid-infrared wavelength range: robustness enhancement

An Orthogonal Type Two-Axis Lloyd'S Mirror For Holographic Fabrication Of Two-Dimensional Planar Scale Gratings With Large Area

Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

Robust design of Si/Si3N4 high contrast grating mirror for mid-infrared VCSEL application

Numerical investigation of vertical-cavity surface-emitting lasers incorporating a high-contrast grating using 3-D FDTD method

Concept of Inverted Refractive-Index-Contrast Grating Mirror and Exemplary Fabrication by 3D Microprinting

Fabrication of a New Type of Transmission Grating with Holography Interferometry and Wet Anisotropic Etching