A New Multi-Dose Method For Extracting Source/Drain Series Resistances Of Halo-Doped Mosfets

Zebang Guo,Zuochang Ye,Xuejie Shi,Yan Wang
DOI: https://doi.org/10.1587/elex.13.20151028
2016-01-01
IEICE Electronics Express
Abstract:A new method for extracting source/drain series resistances (R-sd) by combining split-CV and IV data of MOSFETs with multiple halo implant doses (called Multi-Dose Method) is proposed for the first time. This method eliminates the sensitivity of R-sd on effective channel length and considers halo-induced channel resistance increasing. Calibrated TCAD simulation and experimental data of 28-nm bulk MOSFETs with high-kappa dielectric and metal gates are presented to support and validate the method. The maximum error of this method is within 5%, as compared with 63% for traditional methods. This method has been used as a monitor during technology optimization in foundry.
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