Growth Mechanism and Microstructure of Al Films Deposited on Ionic Liquid Surfaces

Xiangming Tao,Bo Yang,Dongmei Li,Ruirui Ma,Gaoxiang Ye
DOI: https://doi.org/10.1143/jpsj.80.114603
2011-01-01
Journal of the Physical Society of Japan
Abstract:A series of aluminum films, deposited on ionic liquid surfaces by a thermal evaporation method, has been fabricated and its surface morphology as well as microstructure has been investigated in this work. Experimental results show that the quasi-circular aggregates form naturally in a continuous films during deposition. The aggregates are composed of a large number of crystallized metal grains and the area outside of the aggregates exhibits amorphous structure. The experiment indicates that the growth of the quasi-circular aggregates results mainly from two ways: (1) capturing crystal grains, deposited atoms, or amorphous clusters; (2) coalescing of the aggregates.
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