Medium ion energy synthesis of hard elastic fullerene-like hydrogenated carbon film with ultra-low friction and wear in humid air

yongfu wang,junmeng guo,jun zhao,delei ding,yongyong he,junyan zhang
DOI: https://doi.org/10.1016/j.matlet.2014.12.061
IF: 3
2015-01-01
Materials Letters
Abstract:In this article, we prepared the fullerene-like hydrogenated carbon film by using the chemical vapor deposition (CVD) technique with pure CH4 and low ion energy supply (500V). The film exhibits high hardness (~16.8GPa), good elasticity recovery (~82%) and ultra-low friction (~0.023) and wear in humid air. Meanwhile, compared with previous deposition methods, this synthesis method offers advantages such as simpler operation, easier controlling, and lower cost.
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