Study on Tribological Behavior and Mechanism of Fullerene-like Hydrogenated Carbon(FL-C) Film Sliding Against Different Counterparts

WANG Xia,WANG Peng,YANG Sheng-rong,ZHANG Jun-yan
DOI: https://doi.org/10.3321/j.issn:1004-0595.2008.04.003
2008-01-01
Tribology
Abstract:The fullerene-like carbon film was deposited on silicon substrate by dc magnetron sputtering of a titanium target,using methane and argon as the precursors.Friction behavior of the film sliding against different counterparts was investigated on a ball-on-disk tester.Results show that the tribological behavior of the film related to the counterparts.The film exhibited the lowest friction coefficient slid against ball,while the highest friction coefficient was obtained when the film slide against GCr15 steel ball.Combing the results of SEM,3-D profiler and XPS analyses,the tribological mechanism of the film sliding against different counterparts was discussed in detail.
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