A Monolithic Three-Axis Accelerometer With Low Cross-Axis Sensitivity

Changde He,Wendong Zhang,Jijun Xiong,Chenyang Xue,Guixiong Shi
DOI: https://doi.org/10.4028/www.scientific.net/AMR.403-408.691
2012-01-01
Abstract:A 50,000g three-axis accelerometer using a single proof mass is presented. The sensitive structure is made of a single proof mass and eight cantilever beams. Twelve piezoresistors are placed on the cantilevers symmetrically, which can be used to detect 3-dimensional acceleration. The symmetric placement of the piezoresistors brings the reasonable sensitivity and simultaneously decreases the cross-axis sensitivity significantly. Simulation results show that the sensitivity in X-, Y- and Z-axis are 0.806uV/g, 0.806uV/g and 3.7luV/g respectively with 5V supply and the cross-axis sensitivities are all less than 2.4%, which ensures the high performance of the three-axis accelerometer.
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