Single chip integration of MWCNTs/SiO2 thin film humidity sensor based on standard CMOS IC process

Tuo Li,Xiaowei Liu,Changchun Dong,Liang Yin
DOI: https://doi.org/10.1016/j.mee.2014.04.007
IF: 2.3
2014-01-01
Microelectronic Engineering
Abstract:•A kind of single chip integrated MWCNTs thin film humidity sensor with heating cells is proposed.•The sensor is achieved by low cost and simple standard CMOS IC process.•The sensor has good sensitivity, fast response and good long time endurance.•The chip is enforced with sine source signal to reduce the sensor inherent noise.
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