An Excellent Humidity Sensor Made of Surface Acoustic Wave Resonator Coated with MWCNTs/Nafion Composite Material Films

Sheng LEI,Dajing CHEN,Yuquan CHEN,Min PAN
DOI: https://doi.org/10.3969/j.issn.1004-1699.2011.06.007
2011-01-01
Abstract:Humidity detection has been widely used in variety of fields.The demand for various humidity sensors with excellent performance is becoming more and more urgent.A penetrating research was done to analyze the sensitive mechanism of the surface acoustic wave(SAW)sensor and to find its key influence factors.Based on the research conclusion,a novel humidity sensor with excellent performance was made of surface acoustic wave resonator(SAWR)on which multi-walled carbon nanotubes/Nafion(MWCNTs/Nafion)composite material was coated as humidity sensing films.The present sensor showed quite a high sensitivity above 300 kHz/%RH in the range from 10%RH to 80%RH.At the same time,both linearity and response time of the sensor were also improved.The different effect of MWCNTs and Nafion in the composite film was discussed based on the experiment result.
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