Influence of Magnetron Sputtering CoZrNb Stochiometric Relation in Deposition Film

JL Zhang,SM Xiang,CS Yang
DOI: https://doi.org/10.1117/12.408303
2000-01-01
Abstract:The experiments of Co89Zr4Nb67 magnetron sputtering showed that the stochiometric relation in deposited Nm is obviously different from that in target. The fact that Zr and Nb contents, which have larger atomic mass, in deposited film were more than that in target showed there were different virtual sources of Co, Zr and Nb between target and substrate.
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