Deposition and Characterization of Magnetron Sputter (ti, Zr)N Coatings on Room Temperacture

HUANG Jia-mu,XU Cheng-jun,WANG Ya-ping
DOI: https://doi.org/10.3969/j.issn.1673-2812.2005.05.011
2005-01-01
Abstract:The golden-like (Ti, Zr)N film, which has higher hardness and better corrosion resistance than TiN film, was deposited by reactive magnetron sputtering on slides and Al substrates. The crystalline phase, morphology and electronic structure were determined by XRD and STM. The result of XRD showed that the (Ti, Zr)N film was polycrystalline and consisted of mixed crystal of TiN and ZrN phases. STM images of the prepared films indicated that the surface of the films were smooth, dense and compact without large particles attached loosely. The STS spectra showed that doped (Ti, Zr)N didn't had the same energy level and band-gap as TiN, only tow new energy levels, Eg=0.33eV and Eg=0.42eV appeared, therefore the color of (Ti, Zr)N film remains golden-like.
What problem does this paper attempt to address?