Abstract:A hard x-ray nanoprobe beamline is being developed at the Advanced Photon Source (APS). The beamline will house a hard x-ray nanoprobe instrument, one of the centerpieces of the characterization facilities of the Center for Nanoscale Materials (CNM) being constructed at Argonne National Laboratory (ANL). The nanoprobe instrument will operate with photon energies between 3 keV and 30 keV with 30-nm special resolution. Imaging and spectroscopy at this resolution level require staging of x-ray optics and specimens with a mechanical repeatability of better than 10 nm [1]. The instrument will combine a scanning probe mode with a full-field transmission mode. It uses x-ray fluorescence for trace-element mapping and spectroscopy; x-ray diffraction to obtain local structural information such as crystallographic phase, strain texture, and x-ray transmission in phase; and absorption to image internal structures of complex devices. The high-precision positioning mechanisms for the nanoprobe presented here consist of the following major component groups: a granite base with vibration isolators, an optomechanical instrument vacuum chamber, a robotic detector manipulator for microdiffraction, an in situ optical microscope, and a translation-stage system for a transmission imaging detector [2]. Precision positioning mechanisms for a differential scanning stage system with active vibration control in nanometer scale are also presented in this paper. *This work was supported by the U.S. Department of Energy, Office of Basic Energy Sciences, under Contract No. W-31-109-ENG-38. References: [1] J. Maser, G. B. Stephenson, D. Shu, B. Lai, S. Vogt, A. Khounsary, Y. Li, C. Benson, G. Schneider, SRI 2003, AIP Conf. Proc. 705, (2004) 470-473. [2] D. Shu, J. Maser, B. Lai, S. Vogt, M. Holt, C. Preissner, A. Smolyanitskiy, B. Tieman, R. Winarski, and G. B. Stephenson, to be published in the proceedings of X-ray Microscopy 2005, Himeji, Japan, July 2005.

Design and Test of a Differential Scanning Stage System for an X-Ray Nanoprobe Instrument

Design For An X-Ray Nanoprobe Prototype With A Sub-10-Nm Positioning Requirement

High Precision Positioning Mechanisms for a Hard X-ray Nanoprobe Instrument*

Mechanical Design of Ultraprecision Weak-Link Stages for Nanometer-Scale X-Ray Imaging

Optomechanical Design of A Hard X-Ray Nanoprobe Instrument with Nanometer-Scale Active Vibration Control

Mechanical design and development of compact linear nanopositioning flexure stages with centimeter-level travel range and nanometer-level resolution

Mechanical Design of a Precision Linear Flexural Stage for 3D X-Ray Diffraction Microscope at the Advanced Photon Source

Development of an Advanced Sample‐Scanning Stage System Prototype for an MLL‐Based Hard X‐ray Nanoprobe

Development of Large Range Nano-Positioning System Used in Metrological Scanning Microscope

Design of A Precision Flexural Linear Stage System with Sub-Nanometer Resolution and 12-Mm Travel Range

Test of Precision Weak-Link Stage Systems with Large Travel Range and Subnanometre-Scale Resolution

Practical System For Long-Range Nano-Positioning And Nano-Measurement

Design, Modeling and Analysis of a XY Nanopositioning Stage for High Speed Scanning

Design of A Precision Two-Dimensional Tip-Tilting Stage System for Autocollimator-Based Long Trace Profiler Angular Calibration

Study on a Positioning and Measuring System With Nanometer Accuracy

A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle

Design of A Large-Scanning-Range Contact Probe for Nano-Coordinate Measurement Machines

Optomechanical Design of a High-Precision Detector Robot Arm System for X-Ray Nano-Diffraction with X-Ray Nanoprobe

Control and measuring system of a two-dimensional scanning nanopositioning stage based on LabVIEW

Linear Stage System with Subnanometer Resolution and Centimeters Travel Range

Design, Analysis and Testing of A Parallel-Kinematic High-Bandwidth Xy Nanopositioning Stage