Linear Stage System with Subnanometer Resolution and Centimeters Travel Range

D. Shu,J. Maser,B. Lai,Y. Han,S. Vogt,T. S. Toellner,E. E. Alp
2004-01-01
Abstract:The Advanced Photon Source (APS) at the Argonne National Laboratory is a national user facility for synchrotron radiation research. The high-brilliance x-ray beams of this third-generation synchrotron radiation source provide powerful tools for forefront basic and applied research in the fields of materials science; biological science; physics; chemistry; environmental, geophysical, and planetary science; and innovative x-ray instrumentation. Instrument developers at the APS are facing many technical challenges. One of the challenges is to develop a state-of-the-art linear stage system for x-ray instruments with ultrahigh resolution, stability, and a large dynamic range, such as an ultraprecision scanning stage system for an x-ray nanoprobe with pixel repeatability in the nanometer scale [1] and driving mechanism for an ultrahigh-energy-resolution hard x-ray crystal monochromator [2].
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