Abstract:A hard x-ray nanoprobe beamline is being developed at the Advanced Photon Source (APS). The beamline will house a hard x-ray nanoprobe instrument, one of the centerpieces of the characterization facilities of the Center for Nanoscale Materials (CNM) being constructed at Argonne National Laboratory (ANL). The nanoprobe instrument will operate with photon energies between 3 keV and 30 keV with 30-nm special resolution. Imaging and spectroscopy at this resolution level require staging of x-ray optics and specimens with a mechanical repeatability of better than 10 nm [1]. The instrument will combine a scanning probe mode with a full-field transmission mode. It uses x-ray fluorescence for trace-element mapping and spectroscopy; x-ray diffraction to obtain local structural information such as crystallographic phase, strain texture, and x-ray transmission in phase; and absorption to image internal structures of complex devices. The high-precision positioning mechanisms for the nanoprobe presented here consist of the following major component groups: a granite base with vibration isolators, an optomechanical instrument vacuum chamber, a robotic detector manipulator for microdiffraction, an in situ optical microscope, and a translation-stage system for a transmission imaging detector [2]. Precision positioning mechanisms for a differential scanning stage system with active vibration control in nanometer scale are also presented in this paper. *This work was supported by the U.S. Department of Energy, Office of Basic Energy Sciences, under Contract No. W-31-109-ENG-38. References: [1] J. Maser, G. B. Stephenson, D. Shu, B. Lai, S. Vogt, A. Khounsary, Y. Li, C. Benson, G. Schneider, SRI 2003, AIP Conf. Proc. 705, (2004) 470-473. [2] D. Shu, J. Maser, B. Lai, S. Vogt, M. Holt, C. Preissner, A. Smolyanitskiy, B. Tieman, R. Winarski, and G. B. Stephenson, to be published in the proceedings of X-ray Microscopy 2005, Himeji, Japan, July 2005.

Optomechanical Design of A Hard X-Ray Nanoprobe Instrument with Nanometer-Scale Active Vibration Control

High Precision Positioning Mechanisms for a Hard X-ray Nanoprobe Instrument*

Design For An X-Ray Nanoprobe Prototype With A Sub-10-Nm Positioning Requirement

Optomechanical Design of a High-Precision Detector Robot Arm System for X-Ray Nano-Diffraction with X-Ray Nanoprobe

Vibration Compensating Beam Scanning Interferometer for Surface Measurement

Design and Test of a Differential Scanning Stage System for an X-Ray Nanoprobe Instrument

Mechanical Design of Ultraprecision Weak-Link Stages for Nanometer-Scale X-Ray Imaging

Conceptual Design for A Beamline for A Hard X-Ray Nanoprobe with 30 Nm Spatial Resolution

Development of an Advanced Sample‐Scanning Stage System Prototype for an MLL‐Based Hard X‐ray Nanoprobe

Mechanical Design of a Precision Linear Flexural Stage for 3D X-Ray Diffraction Microscope at the Advanced Photon Source

X-ray microscopy instrumentation developments at NSLS-II: recent progress and future directions

Dynamic motion trajectory control with nanoradian accuracy for multi-element X-ray optical systems via laser interferometry

Design of A Large-Scanning-Range Contact Probe for Nano-Coordinate Measurement Machines

Design and Performance of an X-ray Scanning Microscope at the Hard X-ray Nanoprobe Beamline of NSLS-II.

A Robot-Based Detector Manipulator System for a Hard X-ray Nanoprobe Instrument

Optomechanical Design of A Modular K-B Mirror Mount System for X-Ray Microfocusing at the Advanced Photon Source

Precision Flexure Stages Design for a Compact Multilayer Laue Lens Test Bed for Hard X-ray Nanofocusing

Instrument for nm-scale spatial resolution x-ray microscopy using MLL optics

Nm-scale Spatial Resolution X-Ray Imaging with MLL Nanofocusing Optics: Instrumentational Requirements and Challenges

Linear Stage System with Subnanometer Resolution and Centimeters Travel Range

Mechanical design and development of compact linear nanopositioning flexure stages with centimeter-level travel range and nanometer-level resolution