Abstract:This paper presents the design, analysis, and testing of a parallel-kinematic high-bandwidth XY nanopositioning stage driven by piezoelectric stack actuators. The stage is designed with two kinematic chains. In each kinematic chain, the end-effector of the stage is connected to the base by two symmetrically distributed flexure modules, respectively. Each flexure module comprises a fixed-fixed beam and a parallelogram flexure serving as two orthogonal prismatic joints. With the purpose to achieve high resonance frequencies of the stage, a novel center-thickened beam which has large stiffness is proposed to act as the fixed-fixed beam. The center-thickened beam also contributes to reducing cross-coupling and restricting parasitic motion. To decouple the motion in two axes totally, a symmetric configuration is adopted for the parallelogram flexures. Based on the analytical models established in static and dynamic analysis, the dimensions of the stage are optimized in order to maximize the first resonance frequency. Then finite element analysis is utilized to validate the design and a prototype of the stage is fabricated for performance tests. According to the results of static and dynamic tests, the resonance frequencies of the developed stage are over 13.6 kHz and the workspace is 11.2 μm × 11.6 μm with the cross-coupling between two axes less than 0.52%. It is clearly demonstrated that the developed stage has high resonance frequencies, a relatively large travel range, and nearly decoupled performance between two axes. For high-speed tracking performance tests, an inversion-based feedforward controller is implemented for the stage to compensate for the positioning errors caused by mechanical vibration. The experimental results show that good tracking performance at high speed is achieved, which validates the effectiveness of the developed stage.

Control and measuring system of a two-dimensional scanning nanopositioning stage based on LabVIEW

A High-Precision Five-Degree-Of-Freedom Measurement System Based on Laser Collimator and Interferometry Techniques

Cavity Beam Position Monitor Test System Based on Virtual Instrument

Intelligent Measuring System for Performance Parameters of Laser Range Finder

Practical System For Long-Range Nano-Positioning And Nano-Measurement

Study on a Positioning and Measuring System With Nanometer Accuracy

Experimental study on non-linear calibration of two-dimensional nano-positioning stage

Development of Large Range Nano-Positioning System Used in Metrological Scanning Microscope

Development of a Two-Dimensional Ultra Precision Positioning System with Nanometer Resolution

A Coplanar 2D Precision Stage with Large Travel and Nanopositioning Resolution

A Microvision-Based Motion Measurement System for Nanopositioners Using the Feature-to-Phase Method

Design and Test of a Differential Scanning Stage System for an X-Ray Nanoprobe Instrument

Position transducer measuring system of large telescope based on LabVIEW

Design of a Novel Laser Tracking and Measuring System

Test of Precision Weak-Link Stage Systems with Large Travel Range and Subnanometre-Scale Resolution

A LabVIEW-based Control System Design for Femtosecond Laser Micro-Nano Fabrication Processing

Research of magnetic stage control system based on DSP

Design and Testing of One-Dimensional Nano-Positioning Stage with Large Travel Range and High Resolution

Design, Analysis and Testing of A Parallel-Kinematic High-Bandwidth Xy Nanopositioning Stage

2-D Measuring System With Nanometer Resolution And Long Range

Design, Control of an Aerostatic X-Y Planar Motion Stage for Precision Positioning