LiDAR Ranging System with Integrated Near-Infrared SPAD Array
Chen Qianyu,Xu Tang,Liu Zhiqiang,Ma Zhiqiang,Yuan Feng,Xu Yue
DOI: https://doi.org/10.3788/aos231141
2024-01-01
Acta Optica Sinica
Abstract:Objective The laser ranging technology based on single- photon avalanche diode (SPAD) has been widely applied to unmanned driving, intelligent robots, and 3D imaging due to its long detection distance, high resolution, and strong antiinterference ability. The laser ranging methods mainly include direct time-of- flight (dTOF) and indirect time-of-flight (iTOF) measurement techniques. dTOF has higher anti-interference capability and a wider dynamic range than iTOF. Currently, the SPAD-based dTOF laser ranging technology is rapidly developing towards low cost and high integration with silicon-based processes. However, there are still problems such as low near-infrared light detection efficiency, poor ranging stability, and mutual constraints between time resolution and measurement error. To this end, we propose a nearinfrared laser ranging system based on a 0. 18 mu m bipolar- CMOS-DMOS (BCD) process, which has high detection efficiency, low dark count noise, low bit error rate, high resolution, and large dynamic range. Methods The laser ranging system primarily consists of a pulse laser driver, an optical lens, a 4x4 SPAD array, quenching circuits, and a dTOF readout circuit (Fig. 1). The integrated SPAD device employs a high-voltage p-well (HVPW) /high- voltage n+ buried layer (HVBN)) structure as the avalanche multiplication region (Fig. 2). By utilizing the HVPW and HVBN, a thicker and deeply buried avalanche multiplication region is formed to enhance the absorption of near- infrared shortwave photons and improve quantum efficiency. Simultaneously, a low- voltage p-well is injected into the HVPW to increase the net doping concentration in the neutral photon collection region of the HVPW. This widens the effective photon collection region, and facilitates the transfer of optically generated electrons from the HVPW to the avalanche multiplication region, thereby triggering the avalanche effect and further improving the detection probability of near- infrared photons. Meanwhile, combined with an embedded deep-junction avalanche multiplication region, a lowdoped p- type epitaxial layer (p-Epi) is employed to form a virtual guard ring and thus reduce dark counts. This addresses the high dark count rate (DCR) in traditional p-well guard ring or deep n- well virtual guard ring structures. The dTOF readout circuit (Fig. 4) mainly consists of a delay- locked loop (DLL), a phase interpolation circuit, and a counter. An offchip crystal oscillator provides a clock of 50-75 MHz, which is multiplied by four to provide a high-frequency reference clock to the circuit. The timing start signal " Start" of the time- to-digital converter (TDC) is synchronized with the laser emission signal, while the timing stop signal "Stop" is generated by narrow pulse signals produced by the quenching circuit from a detection array composed of 16 SPADs and fed into OR gates. The dTOF readout circuit achieves timing by a twostage process of an 8-bit coarse TDC followed by an 8- bit fine TDC. The coarse TDC calculates the clock cycle number of the DLL output clock Clk < 0 >, which is a dual-chain counter, while the fine TDC determines the start initial phase interpolation and stop final phase interpolation using the 16- phase divided clocks Clk < 0- 15 >. Finally, this system achieves a minimum time resolution of 208 ps/312 ps and a dynamic range of 852 ns/1. 28 mu s. Conclusions A near-infrared laser ranging system with high detection efficiency, low dark count noise, low error rate, high resolution, and large dynamic range is realized based on the 0. 18 mu m BCD process. Test results show that the SPAD device achieves a DCR as low as 162 s- 1 under 5 V excess bias voltage, and the PDP at 905 nm near- infrared wavelength exceeds 8. 5%. The system can operate in the near-infrared bands with a higher eye- safe threshold. The TDC achieves a high time resolution of 208 ps and a dynamic range of 1. 28 mu s under 50 MHz/75 MHz input clock. The DNL and INL are within +/- 0. 1L SB and +/- 0. 6L SB respectively. The measurement error of dTOF for photon flight time is 0. 37 ns. The proposed laser ranging system features high eye-safe threshold, high sensitivity, low noise, and high linearity, providing references for low-cost and high- precision laser ranging applications.