Combinatorial tuning of structure and optoelectronic properties of Zn-Ga-O thin films for deep ultraviolet photodetection
Yuxia Yang,Liu Wang,Shudong Hu,Dongyang Han,Simiao Wu,Zilong Wang,Wenrui Zhang,Jichun Ye
DOI: https://doi.org/10.1016/j.apsusc.2023.158031
IF: 6.7
2023-07-22
Applied Surface Science
Abstract:Ternary complex oxides exhibit strong compositional dependence on their structure and functionalities. While the profound impact of the cation stoichiometry on the physical properties of ZnGa 2 O 4 is widely recognized, how it affects the ultraviolet photodetection behavior remains not clear. Here we apply a combinatorial pulsed laser deposition technique to establish graded composition in Zn x Ga 1-x O (0 ≤ x ≤ 1) across a 2-inch sapphire substrate. In combination with structural and optical characterizations, a systematic investigation of the compositional effect on the phase, crystallinity and bandgap for the Zn x Ga 1-x O system is performed, and their further impact on the photodetection performance is compared by fabricating multiple metal–semiconductor-metal (MSM) photodetectors based on the graded Zn x Ga 1-x O films. Decent photodetection behavior is seen for the photodetectors with x ≤ 0.33, above which the performance is largely limited by the conductive phase formation. An optimized compositional range of x = 0.18–0.27 is identified to deliver the best device performance, which includes a responsivity of 12.88 A/W and a photo-to-dark current ratio of 2.8 × 10 8 . This slight zinc deficiency is considered beneficial for the formation of moderate level of oxygen vacancies or antisite defects that boosts carrier transport. This study sheds light on the composition-dependent evolution of structure and properties in ternary ultrawide-bandgap semiconductors for high-performance ultraviolet photodetection.
chemistry, physical,physics, applied, condensed matter,materials science, coatings & films