Measuring the Young’s Relaxation Modulus of PDMS Using Stress Relaxation Nanoindentation

Du Ping,Lu Hongbing,Zhang Xin
DOI: https://doi.org/10.1557/proc-1222-dd02-03
2009-01-01
Abstract:The Young’s relaxation modulus of Polydimethylsiloxane (PDMS) film specimens was measured by the nanoindenter with a flat punch indenter. In the stress relaxation test, the initial ramp part was carefully considered to develop an accurate viscoelastic contact model. This model was used to fit the load-time data from the experimental tests. The resulting relaxation function was expressed by a general Maxwell equation. In addition, a case study of PDMS micropillar bending tests was performed, and the viscoelastic constitutive law was applied to develop an analytical solution of the reaction force. The results show that the reaction force calculated from the corrected model is generally agreed well with the experimental data.
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