Growth Temperature and Properties of Ge 4 Sb 3 Te 3 Films

Chong T. C.
DOI: https://doi.org/10.1557/proc-830-d6.14
2004-01-01
MRS Proceedings
Abstract:The growth temperature and properties of Ge 4 Sb 3 Te 3 thin films are presented in this paper. The critical growth temperature of Ge 4 Sb 3 Te 3 is between 300 and 340 °C. The Ge 4 Sb 3 Te 3 films can only be grown on a substrate below the critical growth temperature. The typical resistivity and carrier density are in the order of 10 −4 Ωcm and 10 21 cm −3 for crystalline phase. It has a rock salt crystal structure with a lattice constant of 0.602 nm. Ge 4 Sb 3 Te 3 has a better thermal stability but a lower crystallization speed than Ge 2 Sb 2 Te 5 .
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