Investigation of the Si(111) Surface in UHV: Oxidation and the Effect of Surface Phosphorus

H. W. K. Tom,X. D. Zhu,Y. R. Shen,G. A. Somorjai
DOI: https://doi.org/10.1007/978-1-4615-7682-2_21
1985-01-01
Abstract:We have studied the initial stages of oxidation, the segregation of phosphorus, and the effect of phosphorus on oxidation of the Si(111) 7 X 7 surface using optical second-harmonic generation. We have also observed a (√3 X √3) R30° LEED pattern for P on Si (111).
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