Abstract:With the rapid development of science and technology, the demands for miniaturization, integration and high frequency of the electromagnetic devices were steadily increased. The integrated inductor is an important passive component for RF devices such as power transformers, amplifiers and oscillators. However, the performance of on-chip integrated inductors was poor when operating in GHz band. It is well known that, the integration of a magnetic material as magnetic core can effectively improve the performance of inductors [1]. The normal magnetic materials have very lower resonance frequencies (fr), which can't meet the demand of the high frequency inductance components. But if the magnetic films have in-plane uniaxial magnetic anisotropy, the fr can be exceeded 1 GHz [2]. According to the theoretical calculation results, when serving as magnetic core in solenoid inductor, the magnetic films need to hold excellent soft magnetic performance even for the thickness of the film larger than 200 nm. For high frequency soft magnetic monolayer films and granular films, the high frequency magnetic performance are degenerated drastically because of strong inner stress and large grain size when the film thickness increases to a few hundreds of nanometers. Based on our previous study, the multilayer technology can help to maintain good high frequency soft magnetic properties even though the film is very thick [3]. Therefore, the [Fe80Ni20-O/SiO2]n multilayer magnetic film was selected as magnetic core to fabricate the on-chip integrated solenoid inductor and improve the performance of the inductor.

Ferromagnetic Rf Inductors And Transformers For Standard Cmos/Bicmos

Three-solenoid Windings Transformer Baluns on CMOS-grade Silicon Substrate

Fully Integrated Ferrite-Based Inductors for Rf Ics

Ferrite-integrated On-Chip RF Solenoid Inductor

On-chip Vertical Tapered Solenoid Inductor with High Self-Resonance Frequency

The design and fabrication of LTCC chip inductors for high frequency applications based on barium ferrites

On-Chip Integrated Inductors with Ferrite Thin-Films for RF IC

A RF Integrated Inductor with CoZrO Ferrite Thin Film

On-Chip Integrated Inductors with Ni-Zn-Cu-Fe and Y-Bi-Fe Ferrite Thin-films for RF IC

Integrated Solenoid Inductor with [fecosin/sinx]18 Multilayer Magnetic Film for GHz Applications

On-chip soft-ferrite-integrated inductors for RF IC

NiCuZn Ferrite Thin Films for RF Integrated Inductors

Power-Efficient Voltage Tunable Rf Integrated Magnetoelectric Inductors with Fegab/Al2o3 Multilayer Films

MEMS-based Fabrication of High-Performance Inductors with Back Hollow Structure and Ferromagnetic Film

Enhancement of Inductance and Quality Factor in Ghz Range of Solenoid Inductor by Integrating [Fe80ni20-O/sio2](n) Magnetic Multilayer Films

High-Density Planar Integrated Magnetics with Two-Sided Merged Inductor Windings and Integrated Cores for Resonant DC/DC Converter

RF Integrated Planar Inductor Fabricated on Ferrite Substrates

Design and Optimization of A Novel Solenoid Microinductor with Magnetic Core Material

Ferrite-Partially-Filled On-Chip RF Inductor Fabricated Using Low-Temperature Nano-Powder-Mixed-Photoresist Filling Technique for Standard CMOS

Magnetic film inductors for RF IC

Ferrite-Integrated On-Chip Inductors for Rf Ics