Study of the Structural Transformation of Ge 2 Sb 2 Te 5 Induced by Current Pulse in Phase Change Memory

Zhao Rong,Chong Tow Chong,Shi Lu Ping,Tan Pik Kie,Meng Hao,Hu Xiang,Li Ke Bin,Du An Yan
DOI: https://doi.org/10.1557/proc-803-hh1.5
2003-01-01
Abstract:The electrical induced structural transformation of Ge 2 Sb 2 Te 5 thin fdm in phase change memory device was investigated using micro-Raman spectroscopy and transmission electronic microscopy (TEM). Selected area electron diffraction (SAD) pattern showed that the electrical-induced Ge 2 Sb 2 Te 5 film was crystallized into a face-centered cubic structure. Micro-Raman spectra show that the Ge 2 Sb 2 Te 5 active layer at the high resistance state exhibited two minor peaks superposed on the broad peak after several switch cycles, which is identical to those of the Ge 2 Sb 2 Te 5 active layer at the low resistance state. This is most likely due to the accumulation of segregated crystallites. TEM results suggest that the existence of nano-sized nuclei clusters resulted in the reduced resistance for the Ge 2 Sb 2 Te 5 active layer at the high resistance state after first several switches. The dependence of resistance on the cycle number indicates that the deterioration of the Ge 2 Sb 2 Te 5 active layer is resulted from the incomplete amorphization process, which is consistent with the micro-Raman results.
What problem does this paper attempt to address?