Chemical Solution Deposited BaTiO 3 and SrTiO 3 Thin Films With Columnar Microstructure

S. Hoffmann,U. Hasenkox,R. Waser,C. L. Jia,K. Urban
DOI: https://doi.org/10.1557/PROC-474-9
1997-01-01
Abstract:We show that CSD processing can be optimized in order to achieve columnar structured BaTiO 3 and SrTiO 3 thin films at elevated temperatures. In addition to these, columnar grain growth was also obtained for films of the solid solution (Ba 0.7 Sr 0.3 )TiO 3 By controlling the film formation process, polycrystalline and columnar grained thin films were grown on Pt coated Si substrates at temperatures between 750°C and 800°C. The films were analyzed by glancing incidence X-ray diffraction and scanning electron microscopy. Detailed analysis on the thin films’ microstructure was performed by means of transmission electron microscopy. Based on these data, the film formation process is discussed with respect to process control and precursor chemistry. Differences in the crystallization process of BaTiO 3 thin films compared to SrTiO 3 films are pointed out.
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