Abstract:In this article, (NH(4))(2)TiF(6), SrNO(3) and H(3)BO(3) were used as raw materials to prepare the precursor solution with the ratio of AHFT/SN/BA=1:1:3. The thin films of SrTiO(3) were fabricated on the functional silicon substrates (100) by self-assembled monolayers (SAMs) with the liquid phase deposition (LPD). This article also studied the effects of wet state and the deposition temperature of the precursor solution before and after the functionalization of silicon substrate on the thin film growth. The results indicated that after the immersion in OTS for 30min, the surface contact angle of the silicon substrate changed from 24.64 degrees to 100.91 degrees. The substrate appeared hydrophobic property and it was irradiated by UV light for 30min. Then the surface contact angle of the substrate decreased to 5.00 degrees. The substrate appeared hydrophilicity. The concentration of the precursor solution was 0.025 mol/L, the deposition temperature was 40 degrees C and the deposition time was 9h, which were all helpful to SrTiO(3) crystallization. XRD and SEM were used to characterize the physical phase of thin film and surface morphology at 600 degrees C with annealing and heat retaining for 2h. The results indicated that the thin film prepared by the mono-crystal Si substrate was SrTiO(3) thin film with better crystalline. On the crystal surfaces of (110), (100), (200) and (211), there appeared the obvious diffraction peaks. The SrTiO(3) grains on the surface had the clear outline and were regular and long columnar crystals.

Interfacial and Microstructural Properties of Srtio3 Thin Films Grown on Si(001) Substrates

Interfacial Reaction in the Growth of Epitaxial Srtio3 Thin Films on (001) Si Substrates

Epitaxial Growth of Srtio3 Thin Film on Si by Laser Molecular Beam Epitaxy

Determination Of Refractive Indices And Thicknesses Of Ba0.7sr0.3tio3 Films With And Without Mgo (001) Buffer Layer On Silicon Substrate

Atomic Structure of the Interface Between Srtio3 Thin Films and Si(001) Substrates

Initial Growth of Srtio3 on Sr/Si(001) Studied by Scanning Tunneling Microscope

Interface Structure and Phase of Epitaxial SrTiO3 (110) Thin Films Grown Directly on Silicon

Effect of Growth Induced (non)stoichiometry on the Structure, Dielectric Response, and Thermal Conductivity of Srtio3 Thin Films

(Ba,sr)tio3 Thin Film Growth in A Batch Processing Mocvd Reactor

Shrunk Lattice Structure and Interdiffusion Characteristics of 5 Nm Thick Al(2)O(3) Ultrathin Films Sputtered on Silicon.

Microstructure of Epitaxial Ba0.7Sr0.3TiO3∕SrRuO3 Bilayer Films on SrTiO3 Substrates

Chemistry and structure of homoepitaxial SrTiO$_3$ films and their influence on oxide-heterostructure interfaces

Metal-Organic Chemical-Vapor Deposition of (ba,sr)tio3: Nucleation and Growth on Pt-(111)

Interfacial Structure of Epitaxial Srtio3 on Si: Experiments and Simulations

Stoichiometry and Thickness of Epitaxial SrTiO$_{3}$ on Silicon (001): an Investigation of Physical, Optical and Electrical Properties

Growth of Srtio3(110) Film by Oxide Molecular Beam Epitaxy with Feedback Control

Structure And Optical Properties Of Srtio3 Thin Films Prepared By A Sol-Gel Technique

SrTiO<sub>3</sub> Functional Ceramics Thin Film Prepared by Self-Assembled Monolayers with the Liquid Phase Deposition Method on Silicon Substrates

Conducting and Interfacial Properties of Epitaxial SVO Films

The Atomic Structure And Polarization Of Strained Srtio3/Si

Growth of (Ba,Sr)TiO 3 Thin Films by MOCVD: Stoichiometry Effects