Enhanced Light Extraction in N-Gan-based Light-Emitting Diodes with Three-Dimensional Semi-Spherical Structure

Hong-Xing Yin,Chuan-Rui Zhu,Yan Shen,Hai-Fang Yang,Zhe Liu,Chang-Zhi Gu,Bao-Li Liu,Xian-Gang Xu
DOI: https://doi.org/10.1063/1.4865417
IF: 4
2014-01-01
Applied Physics Letters
Abstract:Three-dimensional (3D) periodic micro/nanostructures can have a remarkable enhancement effect on light-emitting diodes (LEDs). However, simple, high-throughput and large-area fabrication of 3D periodic micro/nanostructures with a high duty ratio is difficult. In this Letter, high-duty-ratio 3D semi-spherical structures were fabricated on the surface of n-GaN-based vertical-structure LEDs by under-exposure ultraviolet lithography and dry etching. The resulting LEDs provide about 200% more light output power than those with a flat surface. This method of fabricating high-duty-ratio 3D semi-spherical structures could be used in other optical devices and shows potential for industrial production and commercialization.
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