Abstract:The ablation threshold, depth and crater shape of fused silica for femtosecond laser processing are investigated theoretically and experimentally. Based on tracking the spatiotemporal distribution of the free electron density, free electron temperature, and laser intensity, the electron dynamics as well as the transient optical and thermophysical properties of femtosecond laser irradiated fused silica are quantitatively determined. The numerical model is validated by comparing the calculated threshold fluence, depth and crater shape of ablation with the experimentally measured ones at a wavelength of 800 nm. The free electron relaxation time at different laser fluences and pulse durations throughout the photoionization process and impact ionization process are probed. In the present work, the findings are as follows. 1) The electron relaxation time significantly affects the material optical properties and femtosecond laser energy absorption. The optical properties change dramatically. The fused silica becomes opaque for the case of laser irradiation with fluence higher than the ablation threshold. Moreover, the transition from electron-phonon collision to electron-ion collision accompanies with the femtosecond laser ablation of fused silica. 2) By using the proposed model, the experimentally observed saturation of ablation depth at high laser fluence is elucidated by the significant change of optical reflectivity and absorption coefficient. Both the results of theoretical simulation and experimental observation indicate that laser fluence has a strong influence on the shape of the ablation crater. The ablation volume increases sharply with the increase of laser fluence for femtosecond laser irradiation, compared with that for picosecond laser irradiation. 3) With the increase of femtosecond laser fluence, the ablation depth removal efficiency and ablation efficiency are both saturated, followed by slight decrements. The peak of ablation depth removal efficiency peak occurs at the femtosecond laser fluence close to 1.4 times of the ablation threshold. While the accuracy is slightly low due to the higher sensitivity of the ablation characteristics (ablation crater depth and ablation volume) to the shorter femtosecond laser pulse. For the femtosecond laser fluence higher than 3.5 times of the ablation threshold, good repeatability over a very wide fluence range can achieve accurate processing results, because a more consistent flat-bottom ablation profile tends to appear. However, the heat-affected zone leads the processing quality to degrade, compared with the scenario of femtosecond laser fluence close to the ablation threshold.

Temporal Femtosecond Pulse Shaping Dependence of Laser-Induced Periodic Surface Structures in Fused Silica

Simulation of Femtosecond Laser-Induced Periodic Surface Structures on Fused Silica by Considering Intrapulse and Interpulse Feedback

Laser-induced Periodic Annular Surface Structures on Fused Silica Surface

Femtosecond Laser Processing of Fused Silica and Aluminum Based on Electron Dynamics Control by Shaping Pulse Trains

Controllable Photon Energy Deposition Efficiency in Laser Processing of Fused Silica by Temporally Shaped Femtosecond Pulse: Experimental and Theoretical Study

Theoretical and Experimental Research of Femtosecond Laser Processing Fused Silica

Research on Periodic Structures Aroused by Femtosecond Laser Irradiation on Single-Crystalline Silicon Wafer

Periodic Surface Structures on Dielectrics Upon Femtosecond Laser Pulses Irradiation.

Scan Speed and Fluence Effects in Femtosecond Laser Induced Micro/nano-Structures on the Surface of Fused Silica

Spatiotemporal Probe into the Femtosecond Laser Processing of Fused Silica

Temporal-spatial Dynamics of Femtosecond Time Resolved Plasma in Femtosecond Laser Induced Microstructure

Self-assembled Three-Dimensional Periodic Micro-Nano Structures in Bulk Quartz Crystal Induced by Femtosecond Laser Pulses.

Femtosecond laser-induced periodic structure adjustments based on electron dynamics control: from subwavelength ripples to double-grating structures.

Generation and erasure of femtosecond laser-induced periodic surface structures on nanoparticle-covered silicon by a single laser pulse.

A Two-Step Model for Multiple Picosecond and Femtosecond Pulses Ablation of Fused Silica

Subwavelength Ripples Adjustment Based on Electron Dynamics Control by Using Shaped Ultrafast Laser Pulse Trains

Periodic Subwavelength Ripples On A Si Surface Induced By A Single Temporally Shaped Femtosecond Laser Pulse: Enhanced Periodic Energy Deposition And Reduced Residual Thermal Effect

Structure-Mediated Excitation of Air Plasma and Silicon Plasma Expansion in Femtosecond Laser Pulses Ablation

The influence of ultrafast temporal energy regulation on the morphology of Si surfaces through femtosecond double pulse laser irradiation

Ultrafast Dynamics of Femtosecond Laser Irradiation of Silicon with Different Fluence

Dynamics Of Femtosecond Laser-Induced Periodic Surface Structures On Silicon By High Spatial And Temporal Resolution Imaging