Abstract:Although ultrafast laser materials processing has advanced at a breakneck pace over the last two decades, most applications have been developed with laser pulses at near-IR or visible wavelengths. Recent progress in mid-infrared (MIR) femtosecond laser source development may create novel capabilities for material processing. This is because, at high intensities required for such processing, wavelength tuning to longer wavelengths opens the pathway to a special regime of laser-solid interactions. Under these conditions, due to the ${\lambda}^2$ scaling, the ponderomotive energy of laser-driven electrons may significantly exceed photon energy, band gap and electron affinity and can dominantly drive absorption, resulting in a paradigm shift in the traditional concepts of ultrafast laser-solid interactions. Irreversible high-intensity ultrafast MIR laser-solid interactions are of primary interest in this connection, but they have not been systematically studied so far. To address this fundamental gap, we performed a detailed experimental investigation of high-intensity ultrafast modifications of silicon by single femtosecond MIR pulses (${\lambda}$ = 2.7 - 4.2 ${\mu}$m). Ultrafast melting, interaction with silicon-oxide surface layer, and ablation of the oxide and crystal surfaces were ex-situ characterized by scanning electron, atomic-force, and transmission electron microscopy combined with focused ion-beam milling, electron diffractometry, and ${\mu}$-Raman spectroscopy. Laser induced damage and ablation (LIDA) thresholds were measured as functions of laser wavelength. The traditional theoretical models did not reproduce the wavelength scaling of the damage thresholds. To address the disagreement, we discuss possible novel pathways of energy deposition driven by the ponderomotive energy and field effects characteristic of the MIR wavelength regime.

Ultrafast Dynamics of Femtosecond Laser Irradiation of Silicon with Different Fluence

Research on Periodic Structures Aroused by Femtosecond Laser Irradiation on Single-Crystalline Silicon Wafer

Plasma and Ablation Dynamics in Ultrafast Laser Processing of Crystalline Silicon

Combined Continuum-Atomistic Modeling of Ultrashort-Pulsed Laser Irradiation of Silicon

Femtosecond-Laser-Ablation Dynamics in Silicon Revealed by Transient Reflectivity Change

Dynamics Of Femtosecond Laser-Induced Periodic Surface Structures On Silicon By High Spatial And Temporal Resolution Imaging

Observation of Femtosecond Laser-Induced Ablation in Crystalline Silicon

Ultrafast imaging on the formation of periodic ripples on a Si surface with a prefabricated nanogroove induced by a single femtosecond laser pulse.

Mechanism of Femtosecond-Laser-induced Periodic Nanostructure Formation on Crystalline Silicon Surface Immersed in Water

The influence of ultrafast temporal energy regulation on the morphology of Si surfaces through femtosecond double pulse laser irradiation

Ultrafast Dynamics of Femtosecond Laser-Induced High Spatial Frequency Periodic Structures on Silicon Surfaces

Femtosecond laser induced ablation of crystalline silicon upon double beam irradiation

Generation and erasure of femtosecond laser-induced periodic surface structures on nanoparticle-covered silicon by a single laser pulse.

Ultrafast dynamics observation during femtosecond laser-material interaction

Femtosecond Laser-Induced Cross-Periodic Structures on A Crystalline Silicon Surface under Low Pulse Number Irradiation

Study on Ultrafast Imaging of Silicon Surface Ablated by a Single Nanosecond Laser Pulse

One-Step femtosecond laser irradiation of Single-Crystal Silicon: Evolution of Micro-Nano structures and damage investigation

Molecular dynamics studies of ultrafast laser-induced phase and structural change in crystalline silicon

Single-Shot Multi-Stage Damage and Ablation of Silicon by Femtosecond Mid-infrared Laser Pulses

Investigation of Air Plasma in Ultra-Short Laser Processing of Crystalline Silicon

Sub-wavelength Ripple Formation on Silicon Induced by Femtosecond Laser Radiation