Abstract:Although ultrafast laser materials processing has advanced at a breakneck pace over the last two decades, most applications have been developed with laser pulses at near-IR or visible wavelengths. Recent progress in mid-infrared (MIR) femtosecond laser source development may create novel capabilities for material processing. This is because, at high intensities required for such processing, wavelength tuning to longer wavelengths opens the pathway to a special regime of laser-solid interactions. Under these conditions, due to the ${\lambda}^2$ scaling, the ponderomotive energy of laser-driven electrons may significantly exceed photon energy, band gap and electron affinity and can dominantly drive absorption, resulting in a paradigm shift in the traditional concepts of ultrafast laser-solid interactions. Irreversible high-intensity ultrafast MIR laser-solid interactions are of primary interest in this connection, but they have not been systematically studied so far. To address this fundamental gap, we performed a detailed experimental investigation of high-intensity ultrafast modifications of silicon by single femtosecond MIR pulses (${\lambda}$ = 2.7 - 4.2 ${\mu}$m). Ultrafast melting, interaction with silicon-oxide surface layer, and ablation of the oxide and crystal surfaces were ex-situ characterized by scanning electron, atomic-force, and transmission electron microscopy combined with focused ion-beam milling, electron diffractometry, and ${\mu}$-Raman spectroscopy. Laser induced damage and ablation (LIDA) thresholds were measured as functions of laser wavelength. The traditional theoretical models did not reproduce the wavelength scaling of the damage thresholds. To address the disagreement, we discuss possible novel pathways of energy deposition driven by the ponderomotive energy and field effects characteristic of the MIR wavelength regime.

Femtosecond laser induced ablation of crystalline silicon upon double beam irradiation

Single-crystal silicon ablation with temporally delayed femtosecond laser double-pulse trains

Femtosecond-Laser-Ablation Dynamics in Silicon Revealed by Transient Reflectivity Change

Thermal and non-thermal ablation mechanisms in crystalline silicon by femtosecond laser pulses: classical approach of the carrier density two temperature model

Dual-wavelength femtosecond laser-induced low-fluence single-shot damage and ablation of silicon

Efficiency of silicon micromachining by femtosecond laser pulses in ambient air

Combined Continuum-Atomistic Modeling of Ultrashort-Pulsed Laser Irradiation of Silicon

Comparative experimental study of laser-induced transitions in crystalline silicon by femtosecond, picosecond, and millisecond laser ablation

Single-Shot Multi-Stage Damage and Ablation of Silicon by Femtosecond Mid-infrared Laser Pulses

Femtosecond pulsed laser-induced ablation region development on the Surface of silicon

The Experimental and Modeling Study of Femtosecond Laser-Ablated Silicon Surface

Effect of high-power nanosecond and femtosecond laser pulses on silicon nanostructures

Effects of Parameters in Femtosecond Laser Micromachining on Ablation of Silicon

Femtosecond laser ablation of crystals SiO2 and YAG

Experimental Study on 800 Nm Femtosecond Laser Ablation of Fused Silica in Air and Vacuum

The influence of ultrafast temporal energy regulation on the morphology of Si surfaces through femtosecond double pulse laser irradiation

Pausing ultrafast melting by timed multiple femtosecond-laser pulses

Physics of picosecond pulse laser ablation

Hydrodynamic Simulation of Silicon Ablation by Ultrashort Laser Irradiation

One-Step femtosecond laser irradiation of Single-Crystal Silicon: Evolution of Micro-Nano structures and damage investigation

Ytterbium femtosecond fiber laser ablation synthesis of silicon nanocrystals in water: Laser frequency and pulse energy dependence