Abstract:Although ultrafast laser materials processing has advanced at a breakneck pace over the last two decades, most applications have been developed with laser pulses at near-IR or visible wavelengths. Recent progress in mid-infrared (MIR) femtosecond laser source development may create novel capabilities for material processing. This is because, at high intensities required for such processing, wavelength tuning to longer wavelengths opens the pathway to a special regime of laser-solid interactions. Under these conditions, due to the ${\lambda}^2$ scaling, the ponderomotive energy of laser-driven electrons may significantly exceed photon energy, band gap and electron affinity and can dominantly drive absorption, resulting in a paradigm shift in the traditional concepts of ultrafast laser-solid interactions. Irreversible high-intensity ultrafast MIR laser-solid interactions are of primary interest in this connection, but they have not been systematically studied so far. To address this fundamental gap, we performed a detailed experimental investigation of high-intensity ultrafast modifications of silicon by single femtosecond MIR pulses (${\lambda}$ = 2.7 - 4.2 ${\mu}$m). Ultrafast melting, interaction with silicon-oxide surface layer, and ablation of the oxide and crystal surfaces were ex-situ characterized by scanning electron, atomic-force, and transmission electron microscopy combined with focused ion-beam milling, electron diffractometry, and ${\mu}$-Raman spectroscopy. Laser induced damage and ablation (LIDA) thresholds were measured as functions of laser wavelength. The traditional theoretical models did not reproduce the wavelength scaling of the damage thresholds. To address the disagreement, we discuss possible novel pathways of energy deposition driven by the ponderomotive energy and field effects characteristic of the MIR wavelength regime.

Femtosecond laser ablation of crystals SiO2 and YAG

Femtosecond laser irradiation on YAG and sapphire crystals

Combined Continuum-Atomistic Modeling of Ultrashort-Pulsed Laser Irradiation of Silicon

Direct writing waveguides inside YAG crystal by femtosecond laser

One-Step femtosecond laser irradiation of Single-Crystal Silicon: Evolution of Micro-Nano structures and damage investigation

Pulsed HF/DF Laser Damage in Window Materials.

Mechanisms of femtosecond laser-induced breakdown and damage in MgO

Visible-Infrared Femtosecond Laser-Induced Optical Breakdown of 6H SiC

Dynamics of Femtosecond Laser Pulse Induced Damage in Multilayers

Mechanisms In Fs-Laser Ablation In Fused Silica

Investigation Of Nonlinear Absorption And Laser Damage On Lithium-Niobate Single-Crystals

Femtosecond laser-induced damage characteristics of mid-infrared oxyfluorogallate glass

Femtosecond-Laser-Ablation Dynamics in Silicon Revealed by Transient Reflectivity Change

Molecular dynamics study of the potential formation thickness of ultrafast laser induced sapphire crystal surface recast layer

Effect of high-power nanosecond and femtosecond laser pulses on silicon nanostructures

Dual-wavelength femtosecond laser-induced low-fluence single-shot damage and ablation of silicon

Ablation and Ultrafast Dynamics of Zinc Selenide under Femtosecond Laser Irradiation

Sub-nanosecond Nd:YAG/Cr4+:YAG Crystal Laser Operating at 0.9 Μm

Single-Shot Multi-Stage Damage and Ablation of Silicon by Femtosecond Mid-infrared Laser Pulses

Time-dependent density functional theory of high-intensity, short-pulse laser irradiation on insulators

The Evolution of Ablation Area Induced by Femtosecond Laser