Abstract:The ablation threshold, depth and crater shape of fused silica for femtosecond laser processing are investigated theoretically and experimentally. Based on tracking the spatiotemporal distribution of the free electron density, free electron temperature, and laser intensity, the electron dynamics as well as the transient optical and thermophysical properties of femtosecond laser irradiated fused silica are quantitatively determined. The numerical model is validated by comparing the calculated threshold fluence, depth and crater shape of ablation with the experimentally measured ones at a wavelength of 800 nm. The free electron relaxation time at different laser fluences and pulse durations throughout the photoionization process and impact ionization process are probed. In the present work, the findings are as follows. 1) The electron relaxation time significantly affects the material optical properties and femtosecond laser energy absorption. The optical properties change dramatically. The fused silica becomes opaque for the case of laser irradiation with fluence higher than the ablation threshold. Moreover, the transition from electron-phonon collision to electron-ion collision accompanies with the femtosecond laser ablation of fused silica. 2) By using the proposed model, the experimentally observed saturation of ablation depth at high laser fluence is elucidated by the significant change of optical reflectivity and absorption coefficient. Both the results of theoretical simulation and experimental observation indicate that laser fluence has a strong influence on the shape of the ablation crater. The ablation volume increases sharply with the increase of laser fluence for femtosecond laser irradiation, compared with that for picosecond laser irradiation. 3) With the increase of femtosecond laser fluence, the ablation depth removal efficiency and ablation efficiency are both saturated, followed by slight decrements. The peak of ablation depth removal efficiency peak occurs at the femtosecond laser fluence close to 1.4 times of the ablation threshold. While the accuracy is slightly low due to the higher sensitivity of the ablation characteristics (ablation crater depth and ablation volume) to the shorter femtosecond laser pulse. For the femtosecond laser fluence higher than 3.5 times of the ablation threshold, good repeatability over a very wide fluence range can achieve accurate processing results, because a more consistent flat-bottom ablation profile tends to appear. However, the heat-affected zone leads the processing quality to degrade, compared with the scenario of femtosecond laser fluence close to the ablation threshold.

Controllable Photon Energy Deposition Efficiency in Laser Processing of Fused Silica by Temporally Shaped Femtosecond Pulse: Experimental and Theoretical Study

Traceless Mitigation of Laser Damage Precursors on a Fused Silica Surface by Combining Reactive Ion Beam Etching with Dynamic Chemical Etching

Spatiotemporal Probe into the Femtosecond Laser Processing of Fused Silica

Theoretical and Experimental Research of Femtosecond Laser Processing Fused Silica

Femtosecond Laser Processing of Fused Silica and Aluminum Based on Electron Dynamics Control by Shaping Pulse Trains

Temporal Femtosecond Pulse Shaping Dependence of Laser-Induced Periodic Surface Structures in Fused Silica

Effects of Key Pulse Train Parameters on Electron Dynamics During Femtosecond Laser Nonlinear Ionization of Silica

Controlling of Surface Ablation Threshold of Fused Silica by Double-Pulsed Femtosecond Laser

Chemical Etching Mechanisms and Crater Morphologies Pre-Irradiated by Temporally Decreasing Pulse Trains of Femtosecond Laser

Adjustments of Dielectrics Craters and Their Surfaces by Ultrafast Laser Pulse Train Based on Localized Electron Dynamics Control

Mechanisms In Fs-Laser Ablation In Fused Silica

Etching Rate Enhancement by Shaped Femtosecond Pulse Train Electron Dynamics Control for Microchannels Fabrication in Fused Silica Glass.

Ultrafast heat transfer dynamics induced by femtosecond laser pulse in fused silica

Quantum Multiscale Modeling of Electron Dynamics and Material Properties During Femtosecond Laser-Material Interactions

Phenomenological Modeling for Femtosecond Laser Processing of Fused Silica

Simulation of Femtosecond Laser-Induced Periodic Surface Structures on Fused Silica by Considering Intrapulse and Interpulse Feedback

Ablation Mechanism of Fused Silica under Femtosecond Laser Pulse

Scan Speed and Fluence Effects in Femtosecond Laser Induced Micro/nano-Structures on the Surface of Fused Silica

The influence of ultrafast temporal energy regulation on the morphology of Si surfaces through femtosecond double pulse laser irradiation

Femtosecond Laser Microchannels Fabrication Based on Electrons Dynamics Control Using Temporally or Spatially Shaped Pulses

Experiment-based quantitative analysis of picosecond pulse induced morphological changes in fused silica