Abstract:The ablation threshold, depth and crater shape of fused silica for femtosecond laser processing are investigated theoretically and experimentally. Based on tracking the spatiotemporal distribution of the free electron density, free electron temperature, and laser intensity, the electron dynamics as well as the transient optical and thermophysical properties of femtosecond laser irradiated fused silica are quantitatively determined. The numerical model is validated by comparing the calculated threshold fluence, depth and crater shape of ablation with the experimentally measured ones at a wavelength of 800 nm. The free electron relaxation time at different laser fluences and pulse durations throughout the photoionization process and impact ionization process are probed. In the present work, the findings are as follows. 1) The electron relaxation time significantly affects the material optical properties and femtosecond laser energy absorption. The optical properties change dramatically. The fused silica becomes opaque for the case of laser irradiation with fluence higher than the ablation threshold. Moreover, the transition from electron-phonon collision to electron-ion collision accompanies with the femtosecond laser ablation of fused silica. 2) By using the proposed model, the experimentally observed saturation of ablation depth at high laser fluence is elucidated by the significant change of optical reflectivity and absorption coefficient. Both the results of theoretical simulation and experimental observation indicate that laser fluence has a strong influence on the shape of the ablation crater. The ablation volume increases sharply with the increase of laser fluence for femtosecond laser irradiation, compared with that for picosecond laser irradiation. 3) With the increase of femtosecond laser fluence, the ablation depth removal efficiency and ablation efficiency are both saturated, followed by slight decrements. The peak of ablation depth removal efficiency peak occurs at the femtosecond laser fluence close to 1.4 times of the ablation threshold. While the accuracy is slightly low due to the higher sensitivity of the ablation characteristics (ablation crater depth and ablation volume) to the shorter femtosecond laser pulse. For the femtosecond laser fluence higher than 3.5 times of the ablation threshold, good repeatability over a very wide fluence range can achieve accurate processing results, because a more consistent flat-bottom ablation profile tends to appear. However, the heat-affected zone leads the processing quality to degrade, compared with the scenario of femtosecond laser fluence close to the ablation threshold.

Ultrafast heat transfer dynamics induced by femtosecond laser pulse in fused silica

Combined Continuum-Atomistic Modeling of Ultrashort-Pulsed Laser Irradiation of Silicon

Spatiotemporal Probe into the Femtosecond Laser Processing of Fused Silica

Quantum Multiscale Modeling of Electron Dynamics and Material Properties During Femtosecond Laser-Material Interactions

Ultrafast Thermalization Dynamics of Gold-Coated Fused Silica Irradiated by A Femtosecond Laser

Ultrafast thermalization dynamics in silicon wafer excited by femtosecond laser double-pulse vortex beam

Theoretical and Experimental Research of Femtosecond Laser Processing Fused Silica

Heat Accumulation in Ultrafast Laser Scanning of Fused Silica

Experiment-based quantitative analysis of picosecond pulse induced morphological changes in fused silica

Numerical Simulation of Thermal Effect in Fused Silica Irradiated by Nanosecond High Repetition Rate Laser

Ablation Mechanism of Fused Silica under Femtosecond Laser Pulse

Interaction between sub-picosecond laser and fused silica

Micro- and Nanoscale Heat Transfer in Femtosecond Laser Processing of Metals

Analysis of electron momentum relaxation time in fused silica using a tightly focused femtosecond laser pulse

Mechanisms In Fs-Laser Ablation In Fused Silica

Theoretical and experimental study of femtosecond pulse laser heating on thin metal film

Effects of Key Pulse Train Parameters on Electron Dynamics During Femtosecond Laser Nonlinear Ionization of Silica

Ultrafast Photon-Electron Interactions in Dielectrics by a Single Laser Pulse

Controllable Photon Energy Deposition Efficiency in Laser Processing of Fused Silica by Temporally Shaped Femtosecond Pulse: Experimental and Theoretical Study

Ultrafast Process Characterization of Laser-Induced Damage in Fused Silica Using Pump-Probe Shadow Imaging Techniques

Ultrafast Dynamics of Femtosecond Laser Irradiation of Silicon with Different Fluence