Abstract:Although ultrafast laser materials processing has advanced at a breakneck pace over the last two decades, most applications have been developed with laser pulses at near-IR or visible wavelengths. Recent progress in mid-infrared (MIR) femtosecond laser source development may create novel capabilities for material processing. This is because, at high intensities required for such processing, wavelength tuning to longer wavelengths opens the pathway to a special regime of laser-solid interactions. Under these conditions, due to the ${\lambda}^2$ scaling, the ponderomotive energy of laser-driven electrons may significantly exceed photon energy, band gap and electron affinity and can dominantly drive absorption, resulting in a paradigm shift in the traditional concepts of ultrafast laser-solid interactions. Irreversible high-intensity ultrafast MIR laser-solid interactions are of primary interest in this connection, but they have not been systematically studied so far. To address this fundamental gap, we performed a detailed experimental investigation of high-intensity ultrafast modifications of silicon by single femtosecond MIR pulses (${\lambda}$ = 2.7 - 4.2 ${\mu}$m). Ultrafast melting, interaction with silicon-oxide surface layer, and ablation of the oxide and crystal surfaces were ex-situ characterized by scanning electron, atomic-force, and transmission electron microscopy combined with focused ion-beam milling, electron diffractometry, and ${\mu}$-Raman spectroscopy. Laser induced damage and ablation (LIDA) thresholds were measured as functions of laser wavelength. The traditional theoretical models did not reproduce the wavelength scaling of the damage thresholds. To address the disagreement, we discuss possible novel pathways of energy deposition driven by the ponderomotive energy and field effects characteristic of the MIR wavelength regime.

Ultrafast thermalization dynamics in silicon wafer excited by femtosecond laser double-pulse vortex beam

Electrically Pumped Orbital Angular Momentum (OAM) Laser at Telecom Wavelengths

Ultrafast thermalization dynamics in Au/Ni film excited by femtosecond laser double-pulse vortex beam

Combined Continuum-Atomistic Modeling of Ultrashort-Pulsed Laser Irradiation of Silicon

Energy Transfer Between Femtosecond Laser and Silicon Carbide

Modelling ultrafast non-equilibrium carrier dynamics and relaxation processes upon irradiation of hexagonal Silicon-Carbide with femtosecond laser pulses

Vortex-Controlled Morphology Conversion of Microstructures on Silicon Induced by Femtosecond Vector Vortex Beams

Thermal and non-thermal ablation mechanisms in crystalline silicon by femtosecond laser pulses: classical approach of the carrier density two temperature model

Femtosecond-Laser-Ablation Dynamics in Silicon Revealed by Transient Reflectivity Change

Numerical simulation study on distinguishing nonlinear propagation regimes of femtosecond pulses in fused silica

Ultrafast Laser-Induced Elastodynamics in Single Crystalline Silicon Part I: Model Formulation

The influence of ultrafast temporal energy regulation on the morphology of Si surfaces through femtosecond double pulse laser irradiation

Great enhancement of strong-field ionization in femtosecond-laser subwavelength-structured fused silica

Numerical investigation of heat transfer in ultrafast laser processing of silicon material

Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses

Pausing ultrafast melting by timed multiple femtosecond-laser pulses

Single-Shot Multi-Stage Damage and Ablation of Silicon by Femtosecond Mid-infrared Laser Pulses

Unified theoretical description of thermal and nonthermal laser-induced ultrafast structural changes in solids

Ultrafast control of fractional orbital angular momentum of microlaser emissions

Mechanisms of nonthermal destruction of the superconducting state and melting of the charge-density-wave state by femtosecond laser pulses

Ultrafast pulsed laser stealth dicing of 4H-SiC wafer: Structure evolution and defect generation