Abstract:In this paper, a line-scanning irradiation of <0001> 6H-SiC single crystal by a femtosecond laser focus was implemented for laser fluence of 2.2 J/cm 2 at different scanning velocities from 1000 down to 100 μm/s. The morphology of the obtained ablation lines characterized by a scanning electron microscope shows that there progressively appear three-level ripples with average period of about 222, 600 nm and that between them. Possible formation mechanisms for these three-level ripples were analyzed by numerical simulation employing finite-difference time-domain method (FDTD). Analysis shows that as Obara proposed, the interference of incident wave with the wave scattered by scratches possibly left by fine polishing is the most possible reason for inducing 222 nm-period and 600 nm-period ripples. Main discussions were focused on the orientation characteristics of ripples. Both isolated scratches and crossed scratches with different orientation angles were considered for evaluating their role in field redistribution. The detailed simulations indicate that for scratches oriented 90° with respect to laser polarization generate a pair of strongest ripple-like optical field enhancement compared to scratches with other orientation angles. It is these advantages of 90°-oriented scratch in field enhancement that make the final ripple perpendicular to laser polarization most competitive and finally left on the surface. This complements the physical picture of Obara et al. in terms of their negligence in addressing the orientation characteristics of ripples. Further FDTD simulation of the interaction of incident wave with as-formed 600 nm-period ripples shows that the optical field enhancement located between any two adjacent 600 nm-period ripples is the driving force for splitting 600 nm-period ripples into the third ripples with period between 222 and 600 nm.

Subwavelength Ripples Adjustment Based on Electron Dynamics Control by Using Shaped Ultrafast Laser Pulse Trains

Ultrafast Electron Dynamics Manipulation of Laser Induced Periodic Ripples Via A Train of Shaped Pulses

Simulation of Rippled Structure Adjustments Based on Localized Transient Electron Dynamics Control by Femtosecond Laser Pulse Trains

Investigation on the electron dynamics of periodic nano ripple formation on fused silica induced by temporally shaped femtosecond laser

Adjustments of Dielectrics Craters and Their Surfaces by Ultrafast Laser Pulse Train Based on Localized Electron Dynamics Control

Sub-wavelength Ripple Formation on Silicon Induced by Femtosecond Laser Radiation

The Three-Level Ripples Induced by Femtosecond Laser on a 6H-Sic Single Crystal and the Formation Mechanism

Femtosecond Laser Induced Ripples And Nanohole Arrays On Silicon

Coalescence and dislocation of laser induced periodic ripples on silicon by double time delayed femtosecond laser beams

Evolution of nano-ripples on stainless steel irradiated by picosecond laser pulses

Threshold effect on the femtosecond laser-induced periodic subwavelength structure: An analytical approach

Ultrafast Thermal Modulation Dynamics During Ripples Formation Induced by Femtosecond Laser Multi-Pulse Vortex Beam

Direct Writing of Sub-Wavelength Ripples on Silicon Using Femtosecond Laser at High Repetition Rate

Ultrafast Thermal Dynamics of Nano-Ripples Formation Via Laser Double Pulses Excitation

Periodic Ripple Structures on Silicon Substrates Induced by Femtosecond Laser at Various Scan Modes

The influence of ultrafast temporal energy regulation on the morphology of Si surfaces through femtosecond double pulse laser irradiation

Discussion of the possible formation mechanism of near-wavelength ripples on silicon induced by femtosecond laser

Femtosecond laser induced periodic surface structures on crystals: Formation, evolution and application

Formation and Evolution of Micro/Nano Periodic Ripples on 2205 Stainless Steel Machined by Femtosecond Laser

Formation of Long- and Short-Periodic Nanoripples on Stainless Steel Irradiated by Femtosecond Laser Pulses

A combined model for formation mechanism of ripples induced by femtosecond laser on silicon carbide